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Volumn 5038 I, Issue , 2003, Pages 636-643

New atomic force microscope method for critical dimension metrology

Author keywords

AFM; CD AFM; Critical dimension metrology; High aspect ratio; In line monitor; Nanometer; SPM; Step in mode

Indexed keywords

ASPECT RATIO; CARBON; CARBON NANOTUBES; DENSITY (SPECIFIC GRAVITY); ION BEAMS; PROBES;

EID: 0141500225     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.482813     Document Type: Conference Paper
Times cited : (18)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.