-
2
-
-
0012618901
-
Atomic force microscope
-
G. Binnig, C. F. Quate and Ch. Gerber, "Atomic Force Microscope", Phys. Rev. Lett. 56(9), 930-933 (1986).
-
(1986)
Phys. Rev. Lett.
, vol.56
, Issue.9
, pp. 930-933
-
-
Binnig, G.1
Quate, C.F.2
Gerber, Ch.3
-
3
-
-
0038981463
-
Frequency modulation detection using high-Q cantilevers for enhanced force microscope sensitivity
-
T. R. Albrecht, P. Gruetter, D. Horne, and D. Rugar, "Frequency modulation detection using high-Q cantilevers for enhanced force microscope sensitivity", J. Appl. Phys. 69(2), 668-673 (1991).
-
(1991)
J. Appl. Phys.
, vol.69
, Issue.2
, pp. 668-673
-
-
Albrecht, T.R.1
Gruetter, P.2
Horne, D.3
Rugar, D.4
-
4
-
-
0026943787
-
Magnetic force microscope using a direct resonance frequency sensor operating in air
-
A. Kikukawa, S. Hosaka, Y. Honda and S. Tanaka, "Magnetic force microscope using a direct resonance frequency sensor operating in air", Appl. Phys. Lett. 61(21), 2607-2609 (1992).
-
(1992)
Appl. Phys. Lett.
, vol.61
, Issue.21
, pp. 2607-2609
-
-
Kikukawa, A.1
Hosaka, S.2
Honda, Y.3
Tanaka, S.4
-
5
-
-
20144371627
-
Tapping mode atomic force microscopy in liquids
-
P. K. Hansma, J. P. Cleveland, D. Cleveland, M. Radmacher, D. A. Walters, P. E. Hillner, M. Bezanilla, C. Prater, J. Massle, V. Elings, "Tapping mode atomic force microscopy in liquids", Appl. Phys. Lett. 64(13), 1738-1740 (1994).
-
(1994)
Appl. Phys. Lett.
, vol.64
, Issue.13
, pp. 1738-1740
-
-
Hansma, P.K.1
Cleveland, J.P.2
Cleveland, D.3
Radmacher, M.4
Walters, D.A.5
Hillner, P.E.6
Bezanilla, M.7
Prater, C.8
Massle, J.9
Elings, V.10
-
6
-
-
0001639019
-
Improved atomic force microscopy imaging using carbon-coated probe tips
-
B. B. Doris, R. I. Hegde, "Improved atomic force microscopy imaging using carbon-coated probe tips", Appl. Phys. Lett. 67(25), 3816-3818 (1995).
-
(1995)
Appl. Phys. Lett.
, vol.67
, Issue.25
, pp. 3816-3818
-
-
Doris, B.B.1
Hegde, R.I.2
-
7
-
-
0141642967
-
-
Japan Patent P2936545
-
S. Hosaka et al.,: Japan Patent P2936545 (1988).
-
(1988)
-
-
Hosaka, S.1
-
8
-
-
0000585648
-
Observation of contact holes by atomic force microscopy with a ZnO whisker tip
-
H. Kado, S. Yamamoto, K. Yokoyama, T. Tohda, "Observation of contact holes by atomic force microscopy with a ZnO whisker tip", J. Appl. Phys. 74(7), 4354-4356 (1993).
-
(1993)
J. Appl. Phys.
, vol.74
, Issue.7
, pp. 4354-4356
-
-
Kado, H.1
Yamamoto, S.2
Yokoyama, K.3
Tohda, T.4
-
9
-
-
0035450072
-
Proposal for new atomic force microscopy (AFM) imaging for a high aspect structure (digital probing mode AFM)
-
S. Hosaka, T. Morimoto, K. Kuroda, H. Kunitomo, T. Hiroki, T. Kitsukawa, S. Miwa, H. Yanagimoto and K. Murayama, "Proposal for new atomic force microscopy (AFM) imaging for a high aspect structure (digital probing mode AFM)", Microelectronic Eng. 57-58, 651-657 (2001).
-
(2001)
Microelectronic Eng.
, vol.57-58
, pp. 651-657
-
-
Hosaka, S.1
Morimoto, T.2
Kuroda, K.3
Kunitomo, H.4
Hiroki, T.5
Kitsukawa, T.6
Miwa, S.7
Yanagimoto, H.8
Murayama, K.9
-
10
-
-
0037187255
-
New AFM imaging for observing a high aspect structure
-
S. Hosaka, T. Morimoto, H. Kuroda, Y. Minomoto, Y. Kembo and H. Koyabu, "New AFM imaging for observing a high aspect structure", Appl. Surf. Sci. 188, 467-473 (2002).
-
(2002)
Appl. Surf. Sci.
, vol.188
, pp. 467-473
-
-
Hosaka, S.1
Morimoto, T.2
Kuroda, H.3
Minomoto, Y.4
Kembo, Y.5
Koyabu, H.6
-
11
-
-
0036614382
-
Atomic force microscopy for high aspect ratio structure metrology
-
T. Morimoto, H. Kuroda, Y. Minomoto, Y. Nagano, Y. Kembo and S. Hosaka, "Atomic Force Microscopy for High Aspect Ratio Structure Metrology", Jpn. J. Appl. Phys. 41, 4238-4241 (2002).
-
(2002)
Jpn. J. Appl. Phys.
, vol.41
, pp. 4238-4241
-
-
Morimoto, T.1
Kuroda, H.2
Minomoto, Y.3
Nagano, Y.4
Kembo, Y.5
Hosaka, S.6
-
12
-
-
0036031277
-
New AFM imaging for an in-line LSI process monitor
-
J. C. H. Daniel; SPIE
-
S. Hosaka, T. Morimoto, H. Kuroda, Y. Minomoto, Y. Kembo and H. Koyabu, "New AFM Imaging for an in-line LSI process monitor", Metrology Inspection and Process Control for Microlithography XVI, J. C. H. Daniel, 4689, 492-499, SPIE, (2002).
-
(2002)
Metrology Inspection and Process Control for Microlithography XVI
, vol.4689
, pp. 492-499
-
-
Hosaka, S.1
Morimoto, T.2
Kuroda, H.3
Minomoto, Y.4
Kembo, Y.5
Koyabu, H.6
-
13
-
-
0141754989
-
-
NANOSENSORS
-
NANOSENSORS, "Product Guide", (2000).
-
(2000)
Product Guide
-
-
-
14
-
-
79956028352
-
Mechanical properties of high-aspect-ratio atomic force microscope tips
-
G. Janchen, P. Hoffmann, A. Kriele, H. Lorenz, A. J. Kulik, G. Dietler, "Mechanical properties of high-aspect-ratio atomic force microscope tips", Appl. Phys. Lett. 80(24), 4623-4625 (2002).
-
(2002)
Appl. Phys. Lett.
, vol.80
, Issue.24
, pp. 4623-4625
-
-
Janchen, G.1
Hoffmann, P.2
Kriele, A.3
Lorenz, H.4
Kulik, A.J.5
Dietler, G.6
-
15
-
-
0001469204
-
Carbon-nanotube tips for scanning probe microscopy: Preparation by a controlled process and observation of deoxyribonucleic acid
-
H. Nishijima, S. Kamo, S. Akita, Y. Nakayama, K. I. Hohmura, S. H. Yoshimura and K. Takeyasu, "Carbon-nanotube tips for scanning probe microscopy: Preparation by a controlled process and observation of deoxyribonucleic acid", Appl. Phys. Lett. 74(26), 4061-4063 (1999).
-
(1999)
Appl. Phys. Lett.
, vol.74
, Issue.26
, pp. 4061-4063
-
-
Nishijima, H.1
Kamo, S.2
Akita, S.3
Nakayama, Y.4
Hohmura, K.I.5
Yoshimura, S.H.6
Takeyasu, K.7
|