High aspect ratio cylindrical nanopores in silicon-on-insulator substrates

Solid-State Electronics

Volumn 51, Issue 10 SPEC. ISS, 2007, Pages 1391-1397

  Petrossian, Leo ^a   Wilk, Seth J ^a   Joshi, Punarvasu ^a   Hihath, Sahar ^a   Posner, Jonathan D ^a   Goodnick, Stephen M ^a   Thornton, Trevor J ^a  

^a Arizona State University   (United States)

Author keywords

Coulter counting; Ion channel; Nanopore; Patch clamp; Silicon on insulator

Indexed keywords

ASPECT RATIO; CONCENTRATION (PROCESS); MATHEMATICAL MODELS; NANOPORES; ROBUSTNESS (CONTROL SYSTEMS);

COULTER COUNTING; ION CHANNELS; PATCH-CLAMP;

SILICON ON INSULATOR TECHNOLOGY;

EID: 35148845096     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2007.06.014     Document Type: Article

References (47)

1. Heng J.B., Ho C., Kim T., Timp R., Aksimentiev A., Grinkova Y.V., et al. Sizing DNA using a nanometer-diameter pore. Biophys J 87 4 (2004) 2905-2911
2. Chang H., Kosari F., Andreadakis G., Alam M.A., Vasmatzis G., and Bashir R. DNA-mediated fluctuations in ionic current through silicon oxide nanopore channels. NanoLetters 4 8 (2004) 1551-1556
3. Smeets R.M.M., Keyser U.F., Krapf D., Wu M.Y., Dekker N.H., and Dekker C. Salt dependence of ion transport and DNA translocation through solid-state nanopores. NanoLetters 6 1 (2006) 89-95
4. Fologea D., Uplinger J., Thomas B., McNabb D.S., and Li J.L. Slowing DNA translocation in a solid-state nanopore. NanoLetters 5 9 (2005) 1734-1737
5. Li J., Stein D., McMullan C., Branton D., Aziz M.J., and Golovchenko J.A. Ion-beam sculpting at nanometre length scales 412 6843 (2001) 166-169
6. Coulter WH. Means for counting particles suspended in a fluid. 1953, U.S. Patent Number 2656508.
7. Deblois R.W., Bean C.P., and Wesley R.K.A. Electrokinetic measurements with submicron particles and pores by resistive pulse technique. J Colloid Interf Sci 61 2 (1977) 323-335
8. Hamill O.P., Marty A., Neher E., Sakmann B., and Sigworth F.J. Improved patch-clamp techniques for high-resolution current recording from cells and cell-free membrane patches. Pflug Arch Eur J Phy 391 2 (1981) 85-100
9. Wilk SJ, Petrossian L, Goryll M, Thornton TJ, Goodnick S, Tang J et al. Integrated electrodes on a silicon based ion channel measurement platform. Biosens. Bioelectron., in press. doi:10.1016/j.bios.2007.03.030.
10. Wilk S.J., Goryll M., Laws G.M., Goodnick S.M., Thornton T.J., Saraniti M., et al. Teflon (TM)-coated silicon apertures for supported lipid bilayer membranes. Appl Phys Lett 85 15 (2004) 3307-3309
11. Goryll M, Wilk S, Laws GM, Thornton T, Goodnick S, Saraniti M et al. Integrated sensor design using ion channels inserted into lipid bilayer membranes. In: Nanotechnology, 2004. 4th IEEE conference on 2004. Munich, Germany.
12. Fertig N., Blick R.H., and Behrends J.C. Whole cell patch clamp recording performed on a planar glass chip. Biophys J 82 (2002) 3056-3062
13. Pantoja R., Nagarah J.M., Starace D.M., Melosh N.A., Blunck R., Bezanilla F., et al. Silicon chip-based patch-clamp electrodes integrated with PDMS microfluidics. Biosens Bioelectron 20 3 (2004) 509-517
14. Hirn R., Bayer T.M., Radler J.O., and Sackmann E. Collective membrane motions of high and low amplitude, studied by dynamic light scattering and micro-interferometry. Faraday Discuss (1998) 17-30
15. Martin F., Walczak R., Boiarski A., Cohen M., West T., Cosentino C., et al. Tailoring width of microfabricated nanochannels to solute size can be used to control diffusion kinetics. J Control Release 102 1 (2005) 123-133
16. Han A.P., Schurmann G., Mondin G., Bitterli R.A., Hegelbach N.G., de Rooij N.F., et al. Sensing protein molecules using nanofabricated pores. Appl Phys Lett 88 9 (2006)
17. Uno H., Zhang Z.L., Suzui M., Tero R., Nonogaki Y., Nakao S., et al. Noise analysis of Si-based planar-type ion-channel biosensors. Jpn J Appl Phys 2 45 46-50 (2006) L1334-L1336
18. Storm A.J., Chen J.H., Ling X.S., Zandbergen H.W., and Dekker C. Fabrication of solid-state nanopores with single-nanometre precision. Nat Mater 2 8 (2003) 537-540
19. Mara A., Siwy Z., Trautmann C., Wan J., and Kamme F. An asymmetric polymer nanopore for single molecule detection. NanoLetters 4 3 (2004) 497-501
20. White R.J., Zhang B., Daniel S., Tang J.M., Ervin E.N., Cremer P.S., et al. Ionic conductivity of the aqueous layer separating a lipid bilayer membrane and a glass support. Langmuir 22 25 (2006) 10777-10783
21. Dekker C. Solid-State Nanopores 2 4 (2007) 209-215
22. Trudeau M.C., Warmke J.W., Ganetzky B., and Robertson G.A. Herg, a human inward rectifier in the voltage-gated potassium channel family. Science 269 5220 (1995) 92-95
23. Sanguinetti M.C., Jiang C.G., Curran M.E., and Keating M.T. A mechanistic link between an inherited and an acquired cardiac-arrhythmia - Herg encodes the I-Kr potassium channel. Cell 81 2 (1995) 299-307
24. Curran M.E., Splawski I., Timothy K.W., Vincent G.M., Green E.D., and Keating M.T. A molecular-basis for cardiac-arrhythmia - Herg mutations cause long Qt syndrome. Cell 80 5 (1995) 795-803
25. Lawson K. Potassium channel openers as potential therapeutic weapons in ion channel disease. Kidney Int 57 3 (2000) 838-845
26. Nattel S. The molecular and ionic specificity of antiarrhythmic drug actions. J Cardiovasc Electrophys 10 2 (1999) 272-282
27. Roden D.M., Balser J.R., George A.L., and Anderson M.E. Cardiac ion channels. Annual Rev Physiol 64 (2002) 431-475
28. Bayley H., and Martin C.R. Resistive-pulse sensing - from microbes to molecules. Chem Rev 100 7 (2000) 2575-2594
29. Bayley H., and Jayasinghe L. Functional engineered channels and pores - (Review). Mol Membr Biol 21 4 (2004) 209-220
30. Bayley H., and Cremer P.S. Stochastic sensors inspired by biology. Nature 413 6852 (2001) 226-230
31. In: Neher E., and Sakmann B. (Eds). Single-channel recording. second ed. (1995), Plenum Press, New York
32. Neher E., and Sakmann B. Single-channel currents recorded from membrane of denervated frog muscle-fibers. Nature 260 5554 (1976) 799-802
33. Matthews B., and Judy J. Design and fabrication of a micromachined planar patch-clamp substrate with integrated microfluidics for single-cell measurements. J Microelectromech Syst 15 1 (2006) 214-222
34. Quist A.P., Chand A., Ramachandran S., Daraio C., Jin S., and Lal R. Atomic force microscopy imaging and electrical recording of lipid bilayers supported over microfabricated silicon chip nanopores: Lab-on-a-chip system for lipid membranes and ion channels. Langmuir 23 3 (2007) 1375-1380
35. Mayer M., Kriebel J.K., Tosteson M.T., and Whitesides G.M. Microfabricated teflon membranes for low-noise recordings of ion channels in planar lipid bilayers. Biophys J 85 (2003) 2684-2695
36. Klemic K.G., Klemic J.F., Reed M.A., and Sigworth F.J. Micromolded PDMS planar electrode allows patch clamp electrical recordings from cells. Biosens Bioelectron 17 6-7 (2002) 597-604
37. Malmstadt N., Nash M.A., Purnell R.F., and Schmidt J.J. Automated formation of lipid-bilayer membranes in a microfluidic device. NanoLetters 6 9 (2006) 1961-1965
38. Bernstein G., Ferry D., and Liu W. Process of obtaining improved contrast in electron beam lithography (1990), Arizona Board of Regents, United States of America
39. Lee J.H., Yeom G.Y., Lee J.W., and Lee J.Y. Study of shallow silicon trench etch process using planar inductively coupled plasmas. J Vac Sci Technol A 15 3 (1997) 573-578
40. Robert B. Method of anisotropically etching silicon (1996), Robert Bosch GmbH, United States
41. Levis R.A., and Rae J.L. Constructing a patch clamp setup. Method Enzymol 207 (1992) 14-66
42. Bazant M.Z., Thornton K., and Ajdari A. Diffuse-charge dynamics in electrochemical systems. Phys Rev E 70 2 (2004)
43. Pappaert K., Biesemans J., Clicq D., Vankrunkelsven S., and Desmet G. Measurements of diffusion coefficients in 1-D micro- and nanochannels using shear-driven flows. Lab Chip 5 10 (2005) 1104-1110
44. Tian F.Z., and Kwok D.Y. On the surface conductance, flow rate, and current continuities of microfluidics with nonuniform surface potentials. Langmuir 21 6 (2005) 2192-2198
45. Grahame D.C. The electrical double layer and the theory of electrocapillarity. Chem Rev 41 3 (1947) 441-501
46. Kirby B.J., and Hasselbrink E.F. Zeta potential of microfluidic substrates: 1. Theory, experimental techniques, and effects on separations. Electrophoresis 25 2 (2004) 187-202
47. Behrens S.H., and Grier D.G. The charge of glass and silica surfaces. J Chem Phys 115 14 (2001) 6716-6721