A rapid and low-cost procedure for fabrication of glass microfluidic devices

Journal of Microelectromechanical Systems

Volumn 16, Issue 5, 2007, Pages 1193-1200

  Chen, Qiang ^a   Li, Gang ^a   Jin, Qing Hui ^a   Zhao, Jian Long ^a   Ren, Qiu Shi ^b   Xu, Yuan Sen ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

Microfabrication; Microfluidic devices; UV bonding; Wet etching

Indexed keywords

FLUIDIC DEVICES; MASKS; MICROCHANNELS; MICROFABRICATION; PHOTORESISTORS; WET ETCHING;

GLASS MICROFLUIDIC CHIPS; HARD-BAKING PROCESS;

MICROFLUIDICS;

EID: 34948907349     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.902467     Document Type: Article

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