Fabrication of electrophoresis devices on quartz and glass substrates using a bonding with HF solution

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1997, Pages 299-304

  Nakanishi, H ^a   Nishimoto, T ^a   Nakamura, N ^a   Nagamachi, S ^a   Arai, A ^a   Iwata, Y ^a   Mito, Y ^a  

^a Advanced Technology Research Laboratories   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROPHORESIS; GLASS BONDING; OPTICAL PROPERTIES; QUARTZ; SEMICONDUCTOR DEVICE MANUFACTURE; SUBSTRATES;

CAPILLARY ELECTROPHORESIS (CE) DEVICES; THERMAL BONDING;

MICROELECTROMECHANICAL DEVICES;

EID: 0030697632     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)