Large-area, ordered hexagonal arrays of nanoscale holes or dots from block copolymer templates

Applied Physics Letters

Volumn 91, Issue 14, 2007, Pages

  Vedrine, Josee ^a   Hong, Young Rae ^a   Marencic, Andrew P ^a   Register, Richard A ^a   Adamson, Douglas H ^a   Chaikin, Paul M ^b  

^a Princeton University   (United States)

^b POLYTECHNIC UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HEXAGONAL ARRAYS; METAL DOTS; NANOSCALE HOLES; SHEAR ALIGNED SPHERES; UNPATTERNED SILICON WAFER SUBSTRATES;

FABRICATION; GRAIN BOUNDARIES; POLYMER FILMS; SHEAR STRENGTH; SILICON WAFERS;

BLOCK COPOLYMERS;

EID: 34948856047     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2794010     Document Type: Article

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