Surface encapsulation for low-loss silicon photonics

Applied Physics Letters

Volumn 91, Issue 13, 2007, Pages

  Borselli, M ^a   Johnson, T J ^a   Michael, C P ^a   Henry, M D ^a   Painter, O ^a  

^a California Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COATINGS; ENCAPSULATION; PHOTOVOLTAIC CELLS; SILICON; SURFACE STRUCTURE;

ENCAPSULATION LAYERS; INTERFACE ABSORPTION; SURFACE-SENSITIVE TEST STRUCTURES; THERMAL OXIDATION;

PHOTONICS;

EID: 34848925708     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2793820     Document Type: Article

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