Surface passivation by rehydrogenation of silicon-nitride-coated silicon wafers

Progress in Photovoltaics: Research and Applications

Volumn 13, Issue 3, 2005, Pages 195-200

  McCann, Michelle ^a,b   Weber, Klaus ^a   Blakers, Andrew ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^b UNIVERSITY OF KONSTANZ   (Germany)

Author keywords

LPCVD; Silicon nitride; Silicon oxide; Surface passivation

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DEGRADATION; HEAT TREATMENT; HIGH TEMPERATURE OPERATIONS; HYDROGENATION; PASSIVATION; SILICON NITRIDE; SOLAR CELLS; SURFACE PHENOMENA;

HIGH TEMPERATURE TREATMENTS; LPCVD; SILICON OXIDE; SURFACE PASSIVATION;

SILICON WAFERS;

EID: 17444429618     PISSN: 10627995     EISSN: None     Source Type: Journal    
DOI: 10.1002/pip.580     Document Type: Article

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