Annealing effect on structures and luminescence of amorphous SiN films

Materials Letters

Volumn 61, Issue 28, 2007, Pages 5010-5013

  Xu, Jun ^a   Rui, Yunjun ^a   Chen, Deyuan ^a   Mei, Jiaxin ^a   Zhou, Liping ^a   Cen, Zhanhong ^a   Li, Wei ^a   Chen, Kunji ^a  

^a NANJING UNIVERSITY   (China)

Author keywords

Chemical vapor deposition; Luminescence; Optical materials and properties

Indexed keywords

ANNEALING; CHEMICAL VAPOR DEPOSITION; CONCENTRATION (PROCESS); LUMINESCENCE; METALLIC FILMS; SILICON NITRIDE;

FILM CONCENTRATIONS; STRUCTURAL REARRANGEMENTS;

AMORPHOUS MATERIALS;

EID: 34848916040     PISSN: 0167577X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matlet.2007.03.095     Document Type: Article

References (12)

1. Ziegler A., Idrobe J.C., Cinibulk M.K., Kisielowski C., Browing N.D., and Ritchie R.O. Science 306 (2004) 1768
2. Chen K., Huang X., Xu J., and Feng D. Appl. Phys. Lett. 61 (1992) 2069
3. Mei J., Rui Y., Ma Z., Xu J., Zhu D., Yang L., Li X., Li W., Huang X., and Chen K. Solid State Commun. 131 (2004) 701
4. Park N., Choi C., Seong T., and Park S. Phys. Rev. Lett. 86 (2001) 1355
5. Sung G., Park N., Shin J., Kim K., Kim T., Cho K., and Huh C. IEEE J. Sel. Top. Quantum Electron. 12 (2006) 1545
6. Cho K., park N., Kim T., Kim K., Sung G., and Shin J. Appl. Phys. Lett. 86 (2005) 071909
7. Pandey R.K., Patil L.S., Bange J.P., and Gantam D.K. Opt. Mater. 27 (2004) 139-146
8. Beshkov G., Lei S., Lazarova V., Nedev N., and Georgiev S.S. Vacuum 69 (2003) 301
9. Beshkov G., Lazarova V., and Dimitrov D.B. J. Non-Cryst. Solids 187 (1995) 301
10. Elliott S.R. Physics of Amorphous Materials (1984), Longman, London
11. Swanepoel R. J. Phys. E: Sci.Instrum. 16 (1983) 1214
12. Musale D.V., Sainkar S.R., and Kshirsagar S.T. Diamond Relat. Mater. 11 (2002) 75