A diffusion and reaction related model of the epitaxial lift-off process

Journal of the Electrochemical Society

Volumn 154, Issue 11, 2007, Pages

  Van Niftrik, A T J ^a   Schermer, J J ^a   Bauhuis, G J ^a   Mulder, P ^a   Larsen, P K ^a   Kelly, J J ^b,c  

^a RADBOUD UNIVERSITY NIJMEGEN   (Netherlands)

^b UTRECHT UNIVERSITY   (Netherlands)

^c ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; EPITAXIAL GROWTH; ETCHING; HYDROFLUORIC ACID; REACTION RATES;

ETCH RATES; TEMPERATURE DEPENDENCE;

DIFFUSION;

EID: 34848896956     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2779968     Document Type: Article

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