High-rate GaAs epitaxial lift-off technique for optoelectronic integrated circuits

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 3 SUPPL. B, 1997, Pages 1554-1557

  Maeda, Jun Ichi ^a   Sasaki, Yasushi ^a   Dietz, Nikolaus ^a,b   Shibahara, Kentaro ^a   Yokoyama, Shin ^a   Miyazaki, Seiichi ^a   Hirose, Masataka ^a  

^a HIROSHIMA UNIVERSITY   (Japan)

^b NORTH CAROLINA STATE UNIVERSITY   (United States)

Author keywords

Antifoaming agent; Epitaxial lift off (ELO); Light interference effect; Stirring; Stress; Surfactant

Indexed keywords

EID: 0010061108     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.1554     Document Type: Article

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