X-ray microbeam probing of elastic strains in patterned He+ implanted single-crystal LiNb O3

Applied Physics Letters

Volumn 91, Issue 11, 2007, Pages

  Djukic, Djordje ^a   Roth, Ryan M ^a   Osgood, R M ^a   Evans Lutterodt, Kenneth ^b   Bakhru, Hassaram ^c   Bakhru, Sasha ^c   Welch, David ^d  

^a Columbia University ^*

^b BROOKHAVEN NATIONAL LABORATORY   (United States)

^c STATE UNIVERSITY OF NEW YORK   (United States)

^d BROOKHAVEN NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTICITY; HELIUM; LITHOGRAPHY; STRAIN; X RAY ANALYSIS; X RAY DIFFRACTION;

ELASTIC STRAINS; MICROBEAM PROBING; X-RAY MICRODIFFRACTION;

SINGLE CRYSTALS;

EID: 34548675590     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2776859     Document Type: Article

References (23)

1. R. C. Alferness, Science 234, 825 (1986).
2. M. Levy, R. M. Osgood, Jr., R. Liu, E. Cross, G. S. Cargill III, A. Kumar, and H. Bakhru, Appl. Phys. Lett. 0003-6951 10.1063/1.121801 73, 2293 (1998); P. Rabiei and P. Gunter, Appl. Phys. Lett. 0003-6951 10.1063/1.1819527 85, 4603 (2004); P. Rabiei and W. H. Steier, Appl. Phys. Lett. 0003-6951 10.1063/1.1906311 86, 161115 (2005); Y-B. Park, J. L. Ruglovsky, and H. A. Atwater, Appl. Phys. Lett. 85, 455 (2004).
3. M. Levy, R. M. Osgood, Jr., R. Liu, E. Cross, G. S. Cargill III, A. Kumar, and H. Bakhru, Appl. Phys. Lett. 0003-6951 10.1063/1.121801 73, 2293 (1998); P. Rabiei and P. Gunter, Appl. Phys. Lett. 0003-6951 10.1063/1.1819527 85, 4603 (2004); P. Rabiei and W. H. Steier, Appl. Phys. Lett. 0003-6951 10.1063/1.1906311 86, 161115 (2005); Y-B. Park, J. L. Ruglovsky, and H. A. Atwater, Appl. Phys. Lett. 85, 455 (2004).
4. M. Levy, R. M. Osgood, Jr., R. Liu, E. Cross, G. S. Cargill III, A. Kumar, and H. Bakhru, Appl. Phys. Lett. 0003-6951 10.1063/1.121801 73, 2293 (1998); P. Rabiei and P. Gunter, Appl. Phys. Lett. 0003-6951 10.1063/1.1819527 85, 4603 (2004); P. Rabiei and W. H. Steier, Appl. Phys. Lett. 0003-6951 10.1063/1.1906311 86, 161115 (2005); Y-B. Park, J. L. Ruglovsky, and H. A. Atwater, Appl. Phys. Lett. 85, 455 (2004).
5. M. Levy, R. M. Osgood, Jr., R. Liu, E. Cross, G. S. Cargill III, A. Kumar, and H. Bakhru, Appl. Phys. Lett. 0003-6951 10.1063/1.121801 73, 2293 (1998); P. Rabiei and P. Gunter, Appl. Phys. Lett. 0003-6951 10.1063/1.1819527 85, 4603 (2004); P. Rabiei and W. H. Steier, Appl. Phys. Lett. 0003-6951 10.1063/1.1906311 86, 161115 (2005); Y-B. Park, J. L. Ruglovsky, and H. A. Atwater, Appl. Phys. Lett. 85, 455 (2004).
6. M. Levy, R. M. Osgood, Jr., A. S. Bhalla, R. Guo, L. E. Cross, A. Kumar, S. Sankaran, and H. Bakhru, Appl. Phys. Lett. 77, 2124 (2000).
7. P. D. Townsend, P. J. Chandler, and L. Zhang, Optical Effects of Ion Implantation (University Press, Cambridge, 1994), p. 196.
8. T. Izuhara, R. M. Osgood, Jr., M. Levy, M. E. Reeves, Y. G. Wang, A. N. Roy, and H. Bakhru, Appl. Phys. Lett. 80, 1046 (2002).
9. R. M. Roth, D. Djukic, Y. S. Lee, R. M. Osgood, Jr., S. Bakhru, K. Dunn, H. Bakhru, L. Wu, and M. Huang, Appl. Phys. Lett. 89, 112906 (2006).
10. N. Tamura, H. A. Padmore, and J. R. Patel, Mater. Sci. Eng., A 399, 92 (2005).
11. C. Riekel, Rep. Prog. Phys. 63, 233 (2000).
12. Y. Xiao, Z. Cai, Z. L. Wang, B. Lai, and Y. S. Chu, J. Synchrotron Radiat. 12, 124 (2005).
13. B. C. Larson, W. Yang, G. E. Ice, J. B. Budal, and J. Z. Tischler, Nature (London) 415, 887 (2002).
14. M. Yoon, B. C. Larson, J. Z. Tischler, T. E. Haynes, J.-S. Chung, G. E. Ice, and P. Zschack, Appl. Phys. Lett. 75, 2791 (1999).
15. R. C. Rogan, N. Tamura, G. A. Swift, and E. Ustundag, Nat. Mater. 2, 379 (2003).
16. C. E. Murray, I. C. Noyan, P. M. Mooney, B. Lai, and Z. Cai, Appl. Phys. Lett. 83, 4163 (2003).
17. K. Evans-Lutterodt, J. M. Ablett, A. Stein, C. C. Kao, D. M. Tennant, K. Klemens, A. Taylor, C. Jacobsen, P. L. Gammel, S. Ustin, G. Bogart, and L. Ocala, Opt. Express 12, 919 (2003).
18. J. F. Ziegler, computer code SRIM2003 (www.srim.org).
19. D. Djukic, T. Izuhara, R. Osgood, S. Bakhru, and H. Bakhru (unpublished).
20. L. D. Landau and E. M. Lifshitz, The Equilibrium of Rods and Plates, Theory of Elasticity, 3rd Ed. Course of Theoretical Physics Vol. 7 (Butterworth-Heinemann, Oxford, 1986), Pt., p. 38.
21. L. Thome, A. Gentils, J. Jagielski, S. E. Enescu, and F. Garrido, Nucl. Instrum. Methods Phys. Res. B 0168-583X 219-220, 99 (2004);
22. M. Bianconi, N. Argiolas, M. Bazzan, G. G. Bentini, M. Chiarini, A. Cerutti, P. Mazzoldi, G. Pennestri, and C. Sada, Appl. Phys. Lett. 0003-6951 10.1063/1.2007855 87, 072901 (2005);
23. A. Kling, M. F. da Silva, J. C. Soares, P. F. P. Fichtner, L. Amaral, and F. Zawislak, Nucl. Instrum. Methods Phys. Res. B 175, 394 (2001).