Defect evolution and characterization in He-implanted LiNbO3

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 175-177, Issue , 2001, Pages 394-397

  Kling, A ^a,b   Da Silva, M F ^a,b   Soares, J C ^a,b   Fichtner, P F P ^c   Amaral, L ^c   Zawislak, F ^c  

^a INSTITUTO TECNOLÓGICO E NUCLEAR   (Portugal)

^b CENTRO DE FÍSICA NUCLEAR DA UNIVERSIDADE DE LISBOA   (Portugal)

^c FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

Author keywords

Channeling; He bubbles; Ion implantation; Lithium niobate; Transmission electron microscopy

Indexed keywords

ACTIVATION ENERGY; ANNEALING; CRYSTAL DEFECTS; HELIUM; LITHIUM NIOBATE; SINGLE CRYSTALS; TRANSMISSION ELECTRON MICROSCOPY;

DEFECT EVOLUTION;

ION IMPLANTATION;

EID: 17544403222     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(00)00661-3     Document Type: Conference Paper

References (5)