Configurable electrodes for capacitive-type sensors and chemical sensors

IEEE Sensors Journal

Volumn 6, Issue 1, 2006, Pages 3-10

  Kummer, Adrian M ^a   Hierlemann, Andreas ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

Capacitive chemical sensors; CMOS microsensors; Cross sensitivity; Drift; Humidity; Polymer; Selectivity; Thickness

Indexed keywords

ATMOSPHERIC HUMIDITY; CAPACITANCE; CMOS INTEGRATED CIRCUITS; ELECTRODES; MICROSENSORS; POLYMERS;

CAPACITIVE CHEMICAL SENSORS; CMOS MICROSENSORS; CROSS SENSITIVITY; DRIFT; SELECTIVITY; THICKNESS;

CHEMICAL SENSORS;

EID: 31144457267     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2005.856547     Document Type: Article

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