Simultaneous observation of oxygen uptake curves and electronic states during room-temperature oxidation on Si(0 0 1) surfaces by real-time ultraviolet photoelectron spectroscopy

Surface Science

Volumn 601, Issue 18, 2007, Pages 3838-3842

  Ogawa, S ^a   Takakuwa, Y ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Oxidation; Point defect generation; Real time monitoring; Si surface; Strain; UPS

Indexed keywords

ADSORPTION; DIFFUSION; ELECTRONIC STATES; POINT DEFECTS; REAL TIME CONTROL; ULTRAVIOLET PHOTOELECTRON SPECTROSCOPY;

POINT DEFECT GENERATION; REAL-TIME MONITORING; ROOM-TEMPERATURE;

OXYGEN;

EID: 34548611952     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2007.04.044     Document Type: Article

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