Nanocrystalline tetragonal tantalum thin films

Scripta Materialia

Volumn 57, Issue 11, 2007, Pages 1032-1035

  Zhang, M ^a   Zhang, Y F ^a   Rack, P D ^a   Miller, M K ^b   Nieh, T G ^a,b  

^a University of Tennessee Knoxville   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

Electrical resistivity conductivity; Nanocrystalline materials; Nanoindentation; Refractory metals; Thin films

Indexed keywords

ELASTIC MODULI; ELECTRIC CONDUCTIVITY; HARDNESS; MAGNETRON SPUTTERING; NANOCRYSTALLINE MATERIALS; NANOINDENTATION; TANTALUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

FOUR-POINT PROBE; NANOCRYSTALLINE TETRAGONAL TANTALUM THIN FILMS; NEGATIVE TEMPERATURE DEPENDENCE;

THIN FILMS;

EID: 34548507244     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2007.07.041     Document Type: Article

References (31)

1. Westwood W.D., Waterhouse N., and Wilcox P.S. Tantalum Thin Films (1975), Academic Press, London
2. Tietz T.E., and Wilson J.W. Behavior and Properties of Refractory Metals (1965), Stanford University Press, Stanford, CA
3. Savitskii E.M., and Burkhanov G.S. Physical Metallurgy of Refractory Metals and Alloys (1970), Consultants Bureau, New York
4. Miller G.L. Tantalum and Niobium (1959), Academic Press, New York
5. Cardonne S.M., Kumar P., Michaluk C.A., and Schwartz H.D. Int. J. Refract. Metals Hard Mater. 13 (1995) 187
6. Face D.W., and Prober D.E. J. Vac. Sci. Technol. A 5 (1987) 3408
7. Sinha A.K. Prog. Mater. Sci. 15 (1972) 79
8. Schauer A., and Roschy M. Thin Solid Films 12 (1972) 313
9. Read M.H., and Hensler D.H. Thin Solid Films 10 (1972) 123
10. Marcus R.B., and Quigley S. Thin Solid Films 2 (1968) 467
11. Baker P.N. Thin Solid Films 14 (1972) 3
12. Chen G.S., Lee P.Y., and Chen S.T. Thin Solid Films 353 (1999) 264
13. Gladczuk L., Patel A., Paur C.S., and Sosnowski M. Thin Solid Films 467 (2004) 150
14. Yuan Z.L., Zhang D.H., Li C.Y., Prasad K., Tan C.M., and Tang L.J. Thin Solid Films 434 (2003) 126
15. Zhang J., Huai Y., Chen L., and Zhang J. J. Vac. Sci. Technol. B 21 (2003) 237
16. ASM International Handbook Committee. Metals Handbook. 10th ed. vol. 2 (1990), ASM International, Materials Park, OH
17. Zhang M., Yang B., Chu J., and Nieh T.G. Scripta Mater. 54 (2006) 1227
18. Sara R., and Barnard J.A. J. Cryst. Growth 174 (1997) 495
19. Klug H.P., and Alexander L.E. Diffraction Procedures for Polycrystalline and Amorphous Materials (1974), Wiley, New York
20. Callister Jr. W.D. Materials Science and Engineering: An Introduction. sixth ed. (2004), Von Hoffman Press, Jefferson City, MO
21. Narayan J., Bhosle V., Tiwari A., Gupta A., Kumar P., and Wu R. J. Vac. Sci. Technol. A 24 (2006) 1948
22. Qian L.H., Lu Q.H., kong W.J., and Lu K. Scripta Mater. 50 (2004) 1407
23. Aus M.J., Szpunar B., Erb U., and El-Sherik A.M. J. Appl. Phys. 75 (1994) 3632
24. Lin C.Y., Lee M.C., and Chin T.S. J. Phys. D: Appl. Phys. 40 (2007) 310
25. Ederth J., Kish L.B., Olsson E., and Granqvist C.G. J. Appl. Phys. 88 (2000) 6578
26. Rohr L., Reimann P., Richmond T., and Guntherodt H.J. Mater. Sci. Eng. A 133 (1991) 715
27. Marcone N.J., and Coll J.A. Acta Metall. 12 (1964) 742
28. Blatt F.J. J. Phys. Chem. Solids 17 (1961) 177
29. Schuh C.A., Nieh T.G., and Yamasaki T. Scripta Mater. 46 (2002) 735
30. Schuh C.A., Nieh T.G., and Iwasaki H. Acta Mater. 51 (2003) 431
31. Nieh T.G., and Wadsworth J. Scripta Metall. Mater. 25 (1991) 955