Fabrication of cantilevered tip-on-aperture probe for enhancing resolution of scanning near-field optical microscopy system

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 8 B, 2007, Pages 5563-5567

  Chang, Won Seok ^a   Jeong, Mun Seok ^b   Kim, Dae Chul ^c   Kim, Jeongyong ^c  

^a Korea Institute of Machine and Materials   (South Korea)

^b Gwangju Institute of Science and Technology (GIST)   (South Korea)

^c SolarLight Ltd   (South Korea)

Author keywords

Cantilevered tip on aperture (TOA) probe; Finite difference time domain (FDTD) analysis; Focused ion beam machining; Scanning near field optical microscopy (SNOM)

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; FINITE DIFFERENCE METHOD; FOCUSED ION BEAMS; LASER BEAMS; OPTICAL MICROSCOPY; OPTICAL RESOLVING POWER; TIME DOMAIN ANALYSIS;

CANTILEVERED TIP-ON-APERTURE (TOA) PROBE; FOCUSED ION BEAM MACHINING; SCANNING NEAR-FIELD OPTICAL MICROSCOPY (SNOM);

PROBES;

EID: 34548290383     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.5563     Document Type: Article

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