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Surface and Coatings Technology

Volumn 201, Issue 24, 2007, Pages 9565-9570

Emergence of Ag particles and their effects on the mechanical properties of TaN-Ag nanocomposite thin films

(5) Tseng, C C a Hsieh, J H b Wu, W a Chang, S Y a Chang, C L c

a NATIONAL CHUNG HSING UNIVERSITY (Taiwan)

b MING CHI UNIVERSITY OF TECHNOLOGY (Taiwan)

c MINGDAO UNIVERSITY (Taiwan)

Author keywords

C AFM; Co sputtering; Nanocomposite thin films; TaN Ag

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL GROWTH; FIELD EMISSION; METALLIC MATRIX COMPOSITES; NANOCOMPOSITES; NUCLEATION; RAPID THERMAL ANNEALING; REACTIVE SPUTTERING; SCANNING ELECTRON MICROSCOPY; TOOL STEEL;

CONDUCTIVE ATOMIC FORCE MICROSCOPY; FIELD-EMISSION SCANNING ELECTRON MICROSCOPY; REACTIVE CO-SPUTTERING;

SPUTTER DEPOSITION;

EID: 34548281151 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/j.surfcoat.2007.04.033 Document Type: Article

Times cited : (23)

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