Fabrication and characterization of small unit-cell molecular beam epitaxy grown HgCdTe-on-Si mid-wavelength infrared detectors

Journal of Electronic Materials

Volumn 36, Issue 8, 2007, Pages 1045-1051

  Smith, E P G ^a   Venzor, G M ^a   Petraitis, Y ^a   Liguori, M V ^a   Levy, A R ^a   Rabkin, C K ^a   Peterson, J M ^a   Reddy, M ^a   Johnson, S M ^a   Bangs, J W ^a  

^a RAYTHEON COMPANY   (United States)

Author keywords

15 m unit cell; HgCdTe; Inductively coupled plasma (ICP); Infrared detectors; Large format; Molecular beam epitaxy (MBE); Small pixel

Indexed keywords

RAYTHEON VISION SYSTEMS (RVS); UNIT CELLS;

GROWTH (MATERIALS); HETEROJUNCTIONS; IMAGING SYSTEMS; INDUCTIVELY COUPLED PLASMA; INFRARED DETECTORS; INFRARED IMAGING; MOLECULAR BEAM EPITAXY; PIXELS; SILICON WAFERS;

MERCURY COMPOUNDS;

EID: 34548272160     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-007-0169-6     Document Type: Conference Paper

References (14)

1. W.A. Radford, E.A. Patten, D.F. King, G.K. Pierce, J. Vodicka, P. Goetz, G. Venzor, E.P. Smith, R. Graham, S.M. Johnson, J. Roth, B. Nosho, J. Jensen, SPIE 5783, 331 (2005)
2. A. Rogalski, Infrared Phys. Technol., 41, 213 (2000)
3. W. Cabanski, R. Brieter, R. Koch, K-H. Mauk, W. Rode, J. Ziegler, H. Schneider, M. Walther, R. Oelmaier, SPIE 4369, 547 (2001)
4. N.K. Dhar, M.Z. Tidrow, SPIE 5564, 34 (2004)
5. J.P. Zanatta, G. Badano, P. Ballet, C. Largeron, J. Baylet, O. Gravrand, J. Rothman, P. Castelein, J.P. Chamonal, A. Million, G. Destefanis, S. Mibord, E. Brochier, P. Costa, J. Electron. Mater., 35, 1231 (2006)
6. E.P.G. Smith, R.E. Bornfreund, I. Kasai, L.T. Pham, E.A. Patten, J.M. Peterson, J.A. Roth, B.Z. Nosho, T.J. De Lyon, J.E. Jensen, J.W. Bangs, S.M. Johnson, W.A. Radford, SPIE 6127, 61271F-2 (2006)
7. C.D. Maxey, J.C. Fitzmaurice, H.W. Lau, L.G. Hipwood, C.S. Shaw, C.L. Jones, P. Capper, J. Electron. Mater., 35, 1275 (2006)
8. J.M. Peterson, J.A. Franklin, M. Reddy, S.M. Johnson, E. Smith, W.A. Radford, I. Kasai, J. Electron. Mater., 35, 1283 (2006)
9. S.M. Johnson, A.A. Buell, M.F. Vilela, J.M. Peterson, J.B. Varesi, M.D. Newton, G.M. Venzor, R.E. Bornfreund, W.A. Radford, E.P.G. Smith, J.P. Rosbeck, T.J. De Lyon, J.E. Jensen, V. Nathan, J. Electron. Mater., 33, 526 (2004)
10. E.P.G. Smith, G.M. Venzor, M.D. Newton, M.V. Liguori, J.K. Geason, R.E. Bornfreund, S.M. Johnson, J.D. Benson, A.J. Stoltz, J.B. Varesi, J.H. Dinan, W.A. Radford, J. Electron. Mater., 34, 746 (2005)
11. F. Pistone, S. Verdet, P. Tribolet, G. Destefanis, SPIE 6295, 62950K-1 (2006)
12. L. Vial, A. Combette, D. Gohier, F. Pistone, P. Tribolet, M. Vuillermet, G. Destefanis, SPIE 6395, 63950E-1 (2006)
13. Synopsys Inc., Mountain View, CA, USA
14. E.P.G. Smith, E.A. Patten, P.M. Goetz, G.M. Venzor, J.A. Roth, B.Z. Nosho, J.D. Benson, A.J. Stoltz, J.B. Varesi, J.E. Jensen, S.M. Johnson, W.A. Radford, J. Electron. Mater., 35, 1145 (2006)