The effect of ion energy on the deposition of amorphous carbon phosphide films

Diamond and Related Materials

Volumn 12, Issue 3-7, 2003, Pages 979-982

  Pearce, S R J ^a   Filik, J ^a   May, P W ^a   Wild, R K ^a   Hallam, K R ^a   Heard, P J ^a  

^a UNIVERSITY OF BRISTOL   (United Kingdom)

Author keywords

Carbon phosphide; Diamond like carbon; Film composition; XPS

Indexed keywords

ABSORPTION SPECTROSCOPY; AMORPHOUS MATERIALS; CHEMICAL BONDS; FILM GROWTH; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SECONDARY ION MASS SPECTROMETRY; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

ION ENERGY;

DIAMOND LIKE CARBON FILMS;

DIAMOND;

EID: 0038183981     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(02)00371-0     Document Type: Article

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