Performance characterization of nonevaporable porous Ti getter films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 25, Issue 5, 2007, Pages 1373-1380

  Li, Chien Cheng ^a   Huang, Jow Lay ^a   Lin, Ran Jin ^b,e   Lii, Ding Fwu ^c   Chen, Chia Hao ^d  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b Intellectual Property Exchange Limited   (Taiwan)

^c CHENG SHIU UNIVERSITY   (Taiwan)

^d NATIONAL SYNCHROTRON RADIATION RESEARCH CENTER   (Taiwan)

^e ThermoShuttle Co   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFERENTIAL SCANNING CALORIMETRY; GETTERS; POROUS MATERIALS; SPECIFIC SURFACE AREA; THERMAL DESORPTION; TITANIUM;

COLUMNAR CRYSTALS; GETTER FILMS; POROUS FILMS;

METALLIC FILMS;

EID: 34548237353     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2757177     Document Type: Article

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