Fabrication of thin films with highly porous microstructures

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 13, Issue 3, 1995, Pages 1032-1035

  Smy, T ^b   Friedrich, L J ^a   Dew, S K ^a   Brett, M J ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

^b CARLETON UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC GROWTH; BALLISTIC DEPOSITION; COLUMNAR MICROSTRUCTURES; DOMINANT MECHANISM; EVAPORATION PROCESS; EVAPORATION SOURCE; FABRICATION OF THIN FILMS; FILM SURFACES; GROWTH MECHANISMS; INCIDENT FLUX; INSULATOR FILMS; LINE SEGMENT; METAL FILM; POROUS MICROSTRUCTURE; POROUS STRUCTURES; SUBSTRATE MOVEMENT; ZIGZAG STRUCTURE;

ANISOTROPY; EVAPORATION; MICROSTRUCTURE;

VAPORS;

EID: 65949125075     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.579579     Document Type: Article

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