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Journal of the Electrochemical Society

Volumn 154, Issue 10, 2007, Pages

Cyanide- and thiourea-free electrochemical etching of gold for microelectronics applications

(2) Hu, Zhongmin a,b Ritzdorf, Tom a,b

a Semitool Incorporated (United States)

b ELECTROCHEMICAL SOCIETY

Author keywords

[No Author keywords available]

Indexed keywords

COMPLEXATION; CYANIDES; ELECTROCHEMICAL ETCHING; ELECTROCHEMICAL OXIDATION; POSITIVE IONS; STABILIZERS (AGENTS); THIOUREAS;

CHEMICAL SPECIES; GOLD SEED LAYERS;

GOLD;

EID: 34548224295 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.2768901 Document Type: Article

Times cited : (24)

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