New powerful reagents based on dihalogen/N,N′- dimethylperhydrodiazepine-2,3-dithione adducts for gold dissolution: The IBr case

Dalton Transactions

Volumn , Issue 10, 2003, Pages 1969-1974

  Cau, Lorenzo ^a   Deplano, Paola ^a   Marchiò, Luciano ^b   Mercuri, Maria Laura ^a   Pilia, Luca ^a   Serpe, Angela ^a   Trogu, Emanuele F ^a  

^a Dipartimento di Chimica Inorganica e Analitica   (Italy)

^b UNIVERSITY OF PARMA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; ELECTROCHEMISTRY; ETCHING; MICROELECTRONICS; SPECTROSCOPIC ANALYSIS; SYNTHESIS (CHEMICAL);

ETCHING AGENTS; GOLD POWDER; GOLD-BASED TECHNOLOGY; X-RAY STRUCTURE;

GOLD;

EID: 3142760615     PISSN: 14779226     EISSN: None     Source Type: Journal    
DOI: 10.1039/b210281a     Document Type: Article

References (47)

1. See Platinum/2001 by A. Cowley and M. Steel, http://www.platinum.matthey. com/publications/index.php.
2. Gold is widely used in packages where it makes intimate contact with the active regions as an upper metallization of a complex multilayer system, typically Ti/Pt/Au in GaAs-based devices. It thus plays the role of the first huge barrier to the examination of devices (i.e. after life tests, or during the set up of new processing steps); both the uniform layers and the gold wires hide the visual field to the inspecting instruments [mainly SEM (Scanning Electron Microscopy) and EBIC (Electron Beam Induced Current)] and inhibit the surveying of some bulk phenomena which have high diagnostic relevance for failure analysis. A. Bonfiglio, P. Deplano, R. De Palo, G. Salmini, A. Serpe, E. F. Trogu and M. Vanzi, Proceedings from ISTFA™ (25th International Symposium for testing and Failure Analysis), 14-18th November 1999, Santa Clara, California.
3. See EC website http://europa.eu.int/comm/dgs/environment.
4. R. Schulze, Ger. Offen. DE. 3401961 CI. C22B3/00, 23rd August 1984.
5. S. Ubaldini, P. Fornari, R. Massidda and C. Abbruzzese, Hydrometallurgy, 1998, 48, 113.
6. S. M. Godfrey, N. Ho, C. A. McAuliffe and R. G. Pritchard, Angew. Chem.. Int. Ed. Engl., 1996, 35, 2344.
7. Y. Nakao, J. Chem. Soc., Chem. Commun., 1992, 426;
8. Y. Nakao and K. Sone, Chem. Commun, 1996, 897.
9. F. Bigoli, P. Deplano, M. L. Mercuri, M. A. Pellinghelli, A. Sabatini, E. F. Trogu and A. Vacca, J. Chem. Soc., Dalton Trans., 1996 3583.
10. P. Deplano, J. R. Ferraro, M. L. Mercuri and E. F. Trogu, Coord. Chem. Rev., 1999, 188, 71.
11. F. Bigoli, P. Deplano, A. Ienco, C. Mealli, M. L. Mercuri, M. A. Pellinghelli, G. Pintus, G. Saba and E. F. Trogu, Inorg. Chem., 1999, 38, 4626.
12. F. Bigoli, M. C. Cabras, P. Deplano, M. L. Mercuri, M. A. Pellinghelli, A. Serpe and E. F. Trogu, unpublished work.
13. F. Bigoli, P. Deplano, M. L. Mercuri, M. A. Pellinghelli, G. Pintus, A. Serpe and E. F. Trogu, Chem. Commun., 1998, 2351.
14. F. Bigoli, P. Deplano, M. L. Mercuri, M. A. Pellinghelli, G. Pintus, A. Serpe and E. F. Trogu, J. Am. Chem. Soc., 2001, 123, 1788.
15. M. Vanzi, A. Bonfiglio, P. Salaris, P. Deplano, E. F. Trogu, A. Serpe, G. Salmini and R. De Palo, Microelectron. Reliab., 1999, 39, 1043.
16. P. Deplano, M. L. Mercuri, L. Pilia, G. Pintus, A. Serpe and E. F. Trogu, unpublished work.
17. L. N. Swink and G. B. Carpenter, Acta Crystallogr., Sect. B, 1968, 24, 429-433.
18. N. Bricklebank, P. J. Skabara, D. E. Hibbs, M. B. Hursthouse and K. M. A. Malik, J. Chem. Soc., Dalton Trans., 1999, 3007;
19. P. D. Boyle, J. Christie, T. Dyer, S. M. Godfrey, I. R. Howson, C. McArthur, B. Omar, R. G. Pritchard and G. Rh. Williams, J. Chem. Soc., Dalton Trans., 2000, 3106;
20. F. Bigoli, P. Deplano, M. L. Mercuri, M. A. Pellinghelli and E. F. Trogu, Phosphorus, Sulfur, Silicon Relat. Elem., 1992, 70, 175;
21. F. Bigoli, P. Deplano, M. L. Mercuri, M. A. Pellinghelli, A. Sabatini, E. F. Trogu and A. Vacca, J. Chem. Soc., Dalton Trans., 1996, 3583;
22. F. L. Lu, M. Keshavarz, G. Srdanov, R. H. Jacobson and F. Wudl, J. Org. Chem., 1989, 54, 2165;
23. G. Srdanov and F. Wudl, Polym. Mater. Sci. Eng., 1988, 59, 1074;
24. D. Atzei, P. Deplano, E. F. Trogu, F. Bigoli, M. A. Pellinghelli, A. Sabatini and A. Vacca, Can. J. Chem., 1989, 67, 1416;
25. F. Bigoli, P. Deplano, M. L. Mercuri, M. A. Pellinghelli, A. Sabatini, E. F. Trogu and A. Vacca, Can. J. Chem., 1995, 73, 380.
26. A. J. Blake, F. A. Devillanova, A. Garau, F. Isaia, V. Lippolis, S. Parsons and M. Schroder, J. Chem. Soc., Dalton Trans., 1999, 525;
27. N. Bricklebank, P. J. Skabara, D. E. Hibbs, M. B. Hursthouse and K. M. A. Malik, J. Chem. Soc., Dalton Trans., 1999, 3007;
28. C. Knobler, C. Baker, H. Hope and J. D. McCullough, Inorg. Chem., 1971, 10, 697;
29. P. J. Skabara, N. Bricklebank, R. Berridge, S. Long, M. E. Light, S. J. Coles and M. B. Hursthouse, J. Chem. Soc., Dalton Trans., 2000, 3235;
30. M. Arca, F. A. Devillanova, A. Garau, F. Isaia, V. Lippolis, G. Verani and F. Demartin, Z. Anorg. Allg. Chem., 1998, 624, 745;
31. W. I. Cross, S. M. Godfrey, S. L. Jackson, C. A. McAuliffe and R. G. Pritchard, J. Chem. Soc., Dalton Trans., 1999, 2225.
32. K. Nakamoto, in Infrared and Raman Spectra of Inorganic and Coordination Compounds, John Wiley & Sons, Inc., New York, 4th edn., 1986, pp. 108, 145.
33. F. Bigoli, P. Deplano, M. L. Mercuri, M. A. Pellinghelli, G. Pintus, E. F. Trogu, G. Zonnedda, H. H. Wang and J. M. Williams, Inorg. Chim. Acta, 1998, 273, 175 and references therein.
34. B. Slootmaekers, E. Manessy-Zoupa, S. P. Perlepes and H. O. Desseyn, Spectrochim. Acta, Part A, 1996, 52, 1255.
35. J. Schmitt, P. Machtle, D. Eck, H. Mohwald and C. A. Helm, Langmuir, 1995, 15, 3256.
36. G. Beggiato, G. Casalbore, G. Marconi and M. Mastragostino, Monatsh. Chem., 1983, 114, 675;
37. B. Speiser, Curr. Org. Chem., 1999, 3, 171;
38. A. Walcarius, G. Lefevre, J.-P. Rapin, G. Renaudin and M. Francois, Electroanalysis, 2001, 13, 313.
39. R. Isaksson, T. Liljefors and J. Sandstrom, J. Chem. Res. (S), 1981, 43.
40. Area-Detector Absorption Correction, Siemens Industrial Automation, Inc., Madison, WI, 1996.
41. A. C. T. North, D. C. Phillips and F. S. Mathews, Acta. Crystallogr., Sect. A, 1968, 24, 351-359.
42. A. Altomare, M. C. Burla, M. Camalli, G. L. Cascarano, C. Giacovazzo, A. Guagliardi, A. G. G. Moliterni, G. Polidori and R. Spagna, J. Appl. Crystallogr., 1999, 32, 115-119.
43. G. M. Sheldrick, SHELX97, Programs for Crystal Structure Analysis (Release 97-2), University of Göttingen, Germany, 1997.
44. L. J. Farrugia, J. Appl. Crystallogr., 1999, 32, 837-838.
45. M. Nardelli, Comput. Chem., 1983, 7, 95.
46. M. Nardelli, J. Appl. Crystallogr., 1995, 28, 659.
47. L. J. Farrugia, J. Appl. Crystallogr., 1997, 30, 565.