Reprint of "Fabrication of nano-structures using inverse-μCP technique with a flat PDMS stamp"

Sensors and Actuators, A: Physical

Volumn 139, Issue 1-2 SPEC. ISS., 2007, Pages 356-363

  Kim, Janggil ^a   Takama, Nobuyuki ^a   Kim, Beomjoon ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

Flat PDMS stamp; Inverse micro contact printing (inverse CP); Nano fabrication; Nano needles; Nano patterning; Self assembled monolayer

Indexed keywords

LITHOGRAPHY; MEMS; MICROSTRUCTURE; MOLECULAR STRUCTURE; SELF ASSEMBLED MONOLAYERS; SEMICONDUCTING SILICON;

FLAT PDMS STAMP; INVERSE MICRO CONTACT PRINTING; NANOPATTERNING;

NANOSTRUCTURES;

EID: 34548190632     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.11.039     Document Type: Article

References (13)

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