Thickness dependent nano-crystallization in Ge2Sb 2Te5 films and its effect on devices

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 4 B, 2007, Pages 2211-2214

  Wei, Xiaoqian ^a,b   Shi, Luping ^a   Chong, Tow Chong ^a,b   Zhao, Rong ^a   Lee, Hock Koon ^a  

^a DATA STORAGE INSTITUTE   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Line type PCRAM; Nano crystallization; Phase change material; Thickness dependent effect

Indexed keywords

CRYSTALLIZATION KINETICS; ELECTRIC CONDUCTIVITY; FILM THICKNESS; GERMANIUM COMPOUNDS; PHASE CHANGE MATERIALS; RANDOM ACCESS STORAGE;

CRYSTALLIZATION TEMPERATURE; JOHNSON-MEHL-AVARAMI (JMA) MODELS; THICKNESS-DEPENDENT EFFECTS;

NANOCRYSTALLIZATION;

EID: 34547871718     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.2211     Document Type: Article

References (17)

1. N. Yamada, E. Ohno, K. Nishiuchi, N. Akahira, and M. Takao: J. Appl. Phys. 69 (1991) 2849.
2. J. Maimon, E. Spall, R. Quinn, and S. Schnur: IEEE Proc. Aerospace Conf. Vol. 5, 2001, p. 2289.
3. I. Friedrich, V. Weidenhof, W. Njoroge, P. Franz, and M. Wuttig: J. Appl. Phys. 87 (2000) 4130.
4. V. Weidenhof, I. Friedrich, S. Ziegier, and M. Wuttig: J. Appl. Phys. 89 (2001) 3168.
5. N. Ohshima: J. Appl. Phys. 79 (1996) 8357.
6. C. Trappe, B. Bechevet, S. Facski, and H. Kurz: Jpn. J. Appl. Phys. 37 (1998) 2114.
7. J. Tominaga, T. Nakano, and N. Atoda: Jpn. J. Appl. Phys. 37 (1998) 1852.
8. S. Privitera, E. Rimini, C. Bongiorno, R. Zonca, A. Pirovano, and R. Bez: J. Appl. Phys. 94 (2003) 4409.
9. T. H. Jeong, M. R. Kim, H. Seo, S. J. Kim, and S. Y. Kim: J. Appl. Phys. 86 (1999) 774.
10. D. Chiang, T. R. Jeng, D. R. Huang, Y. Y. Chang, and C. P. Liu: Jpn. J. Appl. Phys. 38 (1999) 1649.
11. H. G. Wang, H. Herman, and X. Liu: J. Mater. Sci. 25 (1990) 2339.
12. J. Park, M. R. Kim, W. S. Choi, H. Seo, and C. Yeon: Jpn. J. Appl. Phys. 38 (1999) 4775.
13. M. Zacharias, J. Biasing, and P. Veit: Appl. Phys. Lett. 74 (1999) 2614.
14. M. Zacharias and P. Streitenberger: Phys. Rev. B 62 (2000) 8391.
15. W. A. Johnson and R. F. Mehl: Trans. AIME 135 (1939) 416.
16. M. Avrami: J. Chem. Phys. 9 (1941) 177.
17. M. H. R. Lankhorst, B. W. S. M. M. Ketelaars, and R. A. M. Wolters: Nat. Mater. 4 (2005) 347.