Giant-grain poly-Si by CW laser annealing of a-Si with cylindrical microlens array

Digest of Technical Papers - SID International Symposium

Volumn 38, Issue 1, 2007, Pages 76-79

  Son, Yong Duck ^a   Son, Nam Kil ^a   Kim, Ki Hyung ^a   Kim, Eun Hyun ^a   Oh, Jae Hwan ^a   Jang, Jin ^a  

^a Kyung Hee University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTALLIZATION; MICROLENSES; POLYSILICON; THRESHOLD VOLTAGE;

CURRENT RATIO; CW LASER CRYSTALLIZATION;

CONTINUOUS WAVE LASERS;

EID: 34547863218     PISSN: 0097966X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1889/1.2785230     Document Type: Conference Paper

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