Theoretical study on the fabrication of a microlens using the excimer laser chemical vapor deposition technique

Thin Solid Films

Volumn 287, Issue 1-2, 1996, Pages 243-246

  Wang, Qingya ^a   Zhang, Yushu ^a   Gao, Dingsan ^a  

^a JILIN UNIVERSITY   (China)

Author keywords

Chemical vapour deposition; Growth mechanism; Laser irradiation; Tin oxide

Indexed keywords

CHEMICAL VAPOR DEPOSITION; EXCIMER LASERS; FILM GROWTH; LASER APPLICATIONS;

EXCIMER LASER CHEMICAL VAPOR DEPOSITION (ELCVD); MICROLENS FABRICATION; PLANE CONVEX LENS;

LENSES;

EID: 0030264971     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)08759-7     Document Type: Article

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