Modelling of lift-off sputter deposition and application to fabrication of a microlens

Thin Solid Films

Volumn 281-282, Issue 1-2, 1996, Pages 246-248

  Serikawa, Tadashi ^a   Shirai, Seiiti ^a  

^a NTT CORPORATION   (Japan)

Author keywords

Deposition process; Optical coatings; Silicon oxide; Sputtering

Indexed keywords

COMPUTER SIMULATION; GLOW DISCHARGES; LENSES; MAGNETRON SPUTTERING; MATHEMATICAL MODELS; OPTICAL COATINGS; OPTICAL FIBER COUPLING; OPTICAL FIBER FABRICATION; OPTICAL SWITCHES; SILICA; THIN FILMS;

INCIDENT ANGULAR DISTRIBUTION; LIFT OFF SPUTTER DEPOSITION; MICROLENS FABRICATION; SHADOWING EFFECT;

SPUTTER DEPOSITION;

EID: 0030217671     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/0040-6090(96)08643-9     Document Type: Article

References (10)

1. J.A. Thornton, J. Vac. Sci. Technol., 11 (1974) 11.
2. T. Serikawa, J. Vac. Sci. Technol., 17 (1980) 582.
3. G.M. Turner, S.M. Rossnagel and J.J. Cuomo, J. Vac. Sci. Technol. A, 11 (1993) 2796.
4. R.V. Joshi and S. Brodsky, Proc. 9th Int. VLSI Multilevel Interconnection Conf., 1992, p. 253.
5. T. Serikawa and T. Sakurai, IEEE Trans. Electron Devices, 29 (1982) 834.
6. S. Shirai, K. Kimura, Y. Irita, N. Naito, T. Serikawa, S. Kohda, N. Yamauchi and M. Yamaguchi, SPIE Proc., 1807 (1992) 328.
7. S. Shirai, T. Serikawa, S. Kohda, N. Kakuda, M. Okamura and N. Yamauchi, Inst. Phys. Conf. Ser., 139 (1995) 191.
8. H.S. Hinton, Photonic Spectra, December (1991) 123.
9. C. Eisenmenger-Sittner, A. Bergauer and H. Bangert, J. Vac. Sci. Technol. A, 12 (1994) 536.
10. Z. Lin and T.S. Cale, J. Vac. Sci. Technol. A, 13 (1995) 2183.