Angle dependent X-ray photoemission study on UV-ozone treatments of indium tin oxide

Applied Surface Science

Volumn 177, Issue 3, 2001, Pages 158-164

  Song, Weijie ^a,b   So, S K ^b   Wang, Daoyuan ^c   Qiu, Yong ^a   Cao, Lili ^a  

^a TSINGHUA UNIVERSITY   (China)

^b HONG KONG BAPTIST UNIVERSITY   (Hong Kong)

^c ULVAC PHI Inc   (Japan)

Author keywords

Angle dependent X ray photoelectron spectroscopy; Indium tin oxide; UV ozone treatment

Indexed keywords

INDIUM COMPOUNDS; OXIDES; OZONE; PHOTOEMISSION; SURFACE CHEMISTRY; ULTRAVIOLET RADIATION; X RAY PHOTOELECTRON SPECTROSCOPY;

X RAY PHOTOEMISSION STUDY;

SURFACE TREATMENT;

EID: 0035827463     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00178-7     Document Type: Article

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