Design and manufacturing of micromechanism elements of 2-DOF micromanipulator

Microsystem Technologies

Volumn 11, Issue 8-10, 2005, Pages 1013-1019

  Kamiya, Daiki ^a   Gozu, Taketo ^a   Horie, Mikio ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Anisotropic etching; Beam; CVD; Electrostatic suction actuator; Large angular displacement; MEMS; Micromachine; Mirror; Multi inputs outputs optical switch; Optical switch; RIE

Indexed keywords

ACTUATORS; ANISOTROPY; CHEMICAL VAPOR DEPOSITION; DEGREES OF FREEDOM (MECHANICS); ELECTRODES; ELECTROSTATICS; INFORMATION TECHNOLOGY; LIGHT; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; OPTICAL SWITCHES; REACTIVE ION ETCHING;

ANISOTROPIC ETCHING; ELECTROSTATIC SUCTION ACTUATORS; LARGE ANGULAR DISPLACEMENT; MEMS; MICROMACHINES; MULTI INPUTS-OUTPUTS OPTICAL SWITCHES;

MICROMANIPULATORS;

EID: 26444464688     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-005-0526-4     Document Type: Conference Paper

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