An on-chip micro-friction tester for tribology research of silicon based MEMS devices

Microsystem Technologies

Volumn 14, Issue 1, 2008, Pages 109-118

  Guo, Zhanshe ^a   Meng, Yonggang ^b   Su, Caijun ^b   Wu, Hao ^b  

^a BEIHANG UNIVERSITY   (China)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

Dynamic friction coefficient; Friction; Side contact; Silicon surface; Static friction coefficient; Wear; Wear debris

Indexed keywords

FRICTION; MICROSYSTEMS; SILICON; SINGLE CRYSTALS; TRIBOLOGY; WEAR OF MATERIALS;

DYNAMIC FRICTION COEFFICIENT; SIDE CONTACT; SILICON SURFACE; STATIC FRICTION COEFFICIENT; WEAR DEBRIS;

MEMS;

EID: 34547838681     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0413-2     Document Type: Article

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