Residual stresses in micro-electro-mechanical systems

Jixie Qiangdu/Journal of Mechanical Strength

Volumn 23, Issue 4, 2001, Pages 393-401

  Qian, Jin ^a   Liu, Cheng ^a   Zhang, Dacheng ^a   Zhao, Yapu ^a  

^a INSTITUTE OF MECHANICS   (China)

Author keywords

Adhesion; Buckling; Micro electro mechanical system; Residual stresses; Resonant frequency; Thin films

Indexed keywords

EID: 0035699708     PISSN: 10019669     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (24)