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Journal of Physics: Conference Series

Volumn 34, Issue 1, 2006, Pages 174-179

Some design considerations on the electrostatically actuated fixed-fixed end type MEMS switches

(3) Sadeghian, Hamed a Rezazadeh, Ghader a Sani, Ebrahim Abbaspour a

a URMIA UNIVERSITY (Iran)

Author keywords

Fringing field; MEMS Switches; Pull in voltage; Residual stress

Indexed keywords

EID: 33744519012 PISSN: 17426588 EISSN: 17426596 Source Type: Conference Proceeding
DOI: 10.1088/1742-6596/34/1/029 Document Type: Article

Times cited : (8)

References (11)

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