메뉴 건너뛰기




Volumn 14, Issue 1, 2008, Pages 99-107

Evaluation of eutectic bond strength and assembly of Al-based microfluidic structures

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ASPECT RATIO; EUTECTICS; MICROFLUIDICS; THIN FILMS;

EID: 34547829294     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-007-0407-0     Document Type: Article
Times cited : (10)

References (23)
  • 3
    • 0035363424 scopus 로고    scopus 로고
    • Assessment of high heat flux thermal management schemes
    • Mudawar I (2001) Assessment of high heat flux thermal management schemes. IEEE Trans Compon Pack Technol 24:122
    • (2001) IEEE Trans Compon Pack Technol , vol.24 , pp. 122
    • Mudawar, I.1
  • 4
    • 14644421513 scopus 로고    scopus 로고
    • An experimental investigation of microchannel flow with internal pressure measurements
    • Kohl MJ, Abdel-Khalik SI, Jeter SM, Sadowski DL (2005) An experimental investigation of microchannel flow with internal pressure measurements. Int J Heat Mass Transf 48:1518
    • (2005) Int J Heat Mass Transf , vol.48 , pp. 1518
    • Kohl, M.J.1    Abdel-Khalik, S.I.2    Jeter, S.M.3    Sadowski, D.L.4
  • 5
    • 17644411021 scopus 로고    scopus 로고
    • Investigation of heat transfer in rectangular microchannels
    • Lee PS, Garimella SV, Liu D (2005) Investigation of heat transfer in rectangular microchannels. Int J Heat Mass Transf 48:1688
    • (2005) Int J Heat Mass Transf , vol.48 , pp. 1688
    • Lee, P.S.1    Garimella, S.V.2    Liu, D.3
  • 7
    • 0034468368 scopus 로고    scopus 로고
    • Design and fabrication of a cross flow micro heat exchanger
    • Harris C, Despa M, Kelly KW (2000) Design and fabrication of a cross flow micro heat exchanger. J MEMS 9:502
    • (2000) J MEMS , vol.9 , pp. 502
    • Harris, C.1    Despa, M.2    Kelly, K.W.3
  • 8
    • 0035276929 scopus 로고    scopus 로고
    • Fabrication of metallic heat exchangers using sacrificial polymer mandrils
    • Arias F, Oliver SRJ, Xu B, Homlin RE, Whitesides GM (2001) Fabrication of metallic heat exchangers using sacrificial polymer mandrils. J MEMS 10:107
    • (2001) J MEMS , vol.10 , pp. 107
    • Arias, F.1    Oliver, S.R.J.2    Xu, B.3    Homlin, R.E.4    Whitesides, G.M.5
  • 9
    • 9944259014 scopus 로고    scopus 로고
    • Microscale compression molding of Al with surface engineered LiGA inserts
    • Cao DM, Meng WJ (2004) Microscale compression molding of Al with surface engineered LiGA inserts. Microsyst Technol 10:662-670
    • (2004) Microsyst Technol , vol.10 , pp. 662-670
    • Cao, D.M.1    Meng, W.J.2
  • 10
    • 33847277048 scopus 로고    scopus 로고
    • Fabrication of high-aspect-ratio microscale Ta mold inserts with micro-electrical-discharge-machining
    • Cao DM, Jiang J, Meng WJ, Jiang JC, Wang W (2007) Fabrication of high-aspect-ratio microscale Ta mold inserts with micro-electrical-discharge- machining. Microsyst Technol 13:503-510
    • (2007) Microsyst Technol , vol.13 , pp. 503-510
    • Cao, D.M.1    Jiang, J.2    Meng, W.J.3    Jiang, J.C.4    Wang, W.5
  • 11
    • 0035507796 scopus 로고    scopus 로고
    • Amorphous hydrocarbon based thin films for high-aspect-ratio MEMS applications.
    • Cao DM, Wang T, Feng B, Meng WJ, Kelly KW (2001) Amorphous hydrocarbon based thin films for high-aspect-ratio MEMS applications. Thin Solid Films 398/399:553
    • (2001) Thin Solid Films , vol.398-399 , pp. 553
    • Cao, D.M.1    Wang, T.2    Feng, B.3    Meng, W.J.4    Kelly, K.W.5
  • 12
    • 0038297569 scopus 로고    scopus 로고
    • Conformal deposition of Ti-containing hydrocarbon coatings over LiGA fabricated high-aspect-ratio micro-scale structures and tribological characteristics.
    • Cao DM, Meng WJ, Simko SJ, Doll GL, Wang T, Kelly KW (2003) Conformal deposition of Ti-containing hydrocarbon coatings over LiGA fabricated high-aspect-ratio micro-scale structures and tribological characteristics. Thin Solid Films 429:46
    • (2003) Thin Solid Films , vol.429 , pp. 46
    • Cao, D.M.1    Meng, W.J.2    Simko, S.J.3    Doll, G.L.4    Wang, T.5    Kelly, K.W.6
  • 13
    • 33745215629 scopus 로고    scopus 로고
    • Fabrication of high-aspect-ratio microscale mold inserts by parallel μeDM
    • Cao DM, Jiang J, Yang R, Meng WJ (2006) Fabrication of high-aspect-ratio microscale mold inserts by parallel μEDM. Microsyst Technol 12:839
    • (2006) Microsyst Technol , vol.12 , pp. 839
    • Cao, D.M.1    Jiang, J.2    Yang, R.3    Meng, W.J.4
  • 14
    • 0027611874 scopus 로고
    • Anodic bonding of silicon to silicon-wafers coated with aluminum, silicon-oxide, polysilicon, or silicon-nitride
    • 8
    • Nese M, Hanneborg A (1993) Anodic bonding of silicon to silicon-wafers coated with aluminum, silicon-oxide, polysilicon, or silicon-nitride. Sensor Actuat A 37(8):61-67
    • (1993) Sensor Actuat A , vol.37 , pp. 61-67
    • Nese, M.1    Hanneborg, A.2
  • 15
    • 0025496411 scopus 로고
    • Silicon direct bonding for sensor applications-characterization of the bond quality
    • Harendt C, Hofflinger B, Graf HG et al (1991) Silicon direct bonding for sensor applications-characterization of the bond quality. Sensor Actuat A 25:87-92
    • (1991) Sensor Actuat A , vol.25 , pp. 87-92
    • Harendt, C.1    Hofflinger, B.2    Graf, H.G.3
  • 16
    • 0026226177 scopus 로고
    • Direct bonding of micromachined silicon wafers for laser diode heat exchanger applications
    • 3
    • Hunt CE, Desmond CA, Ciarlo DR, Benett WJ (1991) Direct bonding of micromachined silicon wafers for laser diode heat exchanger applications. J Micromech Microeng 1(3):152-156
    • (1991) J Micromech Microeng , vol.1 , pp. 152-156
    • Hunt, C.E.1    Desmond, C.A.2    Ciarlo, D.R.3    Benett, W.J.4
  • 17
    • 0026225616 scopus 로고
    • Silicon-to-silicon anodic bonding with a borosilicate glass layer
    • 3
    • Hanneborg A, Nese M, Ohlckers P (1991) Silicon-to-silicon anodic bonding with a borosilicate glass layer. J Micromech Microeng 1(3):139-144
    • (1991) J Micromech Microeng , vol.1 , pp. 139-144
    • Hanneborg, A.1    Nese, M.2    Ohlckers, P.3
  • 18
    • 33847316131 scopus 로고    scopus 로고
    • Eutectic bonding of Al-based high aspect ratio microscale structures
    • Mei F, Jiang J, Meng WJ (2007) Eutectic bonding of Al-based high aspect ratio microscale structures. Microsyst Technol 13:723-730
    • (2007) Microsyst Technol , vol.13 , pp. 723-730
    • Mei, F.1    Jiang, J.2    Meng, W.J.3
  • 19
    • 0001116463 scopus 로고    scopus 로고
    • Inductively coupled plasma assisted physical vapor deposition of titanium nitride coatings
    • Meng WJ, Curtis TJ (1997) Inductively coupled plasma assisted physical vapor deposition of titanium nitride coatings. J Electron Mater 26:1297
    • (1997) J Electron Mater , vol.26 , pp. 1297
    • Meng, W.J.1    Curtis, T.J.2
  • 20
    • 0033503393 scopus 로고    scopus 로고
    • Temperature dependence of inductively coupled plasma assisted deposition of titanium nitride coatings
    • Meng WJ, Curtis TJ, Rehn LE, Baldo PM (1999) Temperature dependence of inductively coupled plasma assisted deposition of titanium nitride coatings. Surf Coat Technol 120/121:206
    • (1999) Surf Coat Technol , vol.120-121 , pp. 206
    • Meng, W.J.1    Curtis, T.J.2    Rehn, L.E.3    Baldo, P.M.4
  • 21
    • 0003689862 scopus 로고
    • Massalski TB (ed) ASM, Metals Park
    • Massalski TB (ed) (1986) Binary alloy phase diagrams. ASM, Metals Park, p 116
    • (1986) Binary Alloy Phase Diagrams , pp. 116
  • 23
    • 34547117145 scopus 로고    scopus 로고
    • Further experiments and modeling for microscale compression molding of metals at elevated temperatures
    • in press
    • Jiang J, Meng WJ, Sinclair GB, Lara-Curzio E (2007) Further experiments and modeling for microscale compression molding of metals at elevated temperatures. J Mater Res (in press)
    • (2007) J Mater Res
    • Jiang, J.1    Meng, W.J.2    Sinclair, G.B.3    Lara-Curzio, E.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.