Investigation of O-atom kinetics in O2, CO2, H 2O and O2/HMDSO low pressure radiofrequency pulsed plasmas by time-resolved optical emission spectroscopy

Plasma Sources Science and Technology

Volumn 16, Issue 3, 2007, Pages 597-605

  Bousquet, A ^a   Cartry, G ^b   Granier, A ^c  

^a UNIVERSITÉ CLERMONT AUVERGNE   (France)

^b AIX MARSEILLE UNIVERSITÉ   (France)

^c UNIVERSITÉ DE NANTES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC PHYSICS; EXCITATION ENERGY; OPTICAL EMISSION SPECTROSCOPY; PRESSURE EFFECTS; REACTION KINETICS;

DISSOCIATIVE EXCITATION; PULSED PLASMAS; TIME-RESOLVED OPTICAL EMISSION SPECTROSCOPY;

PLASMA WAVES;

EID: 34547790421     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/16/3/020     Document Type: Article

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