Heterogeneous recombination of neutral oxygen atoms on niobium surface

Applied Surface Science

Volumn 211, Issue 1-4, 2003, Pages 96-101

  Mozetič, Miran ^a   Zalar, Anton ^a   Cvelbar, Uroš ^a   Poberaj, Igor ^b  

^a Institute of Surface Engineering and Optoelectronics Ljubljana   (Slovenia)

^b UNIVERSITY OF LJUBLJANA   (Slovenia)

Author keywords

Adatoms; Niobium; Oxygen; Plasma processing

Indexed keywords

ELECTRIC DISCHARGES; IONIZATION; NIOBIUM; OXYGEN; PLASMA DEVICES; POLYCRYSTALLINE MATERIALS;

PLASMA PROCESSING;

SURFACE CHEMISTRY;

EID: 0037540064     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(03)00202-2     Document Type: Article

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