Characterization of oxygen plasma with a fiber optic catalytic probe and determination of recombination coefficients

IEEE Transactions on Plasma Science

Volumn 33, Issue 2 II, 2005, Pages 834-837

  Cvelbar, Uros ^a   Mozetič, Miran ^a   Ricard, Andre ^b  

^a JO EF STEFAN INSTITUTE   (Slovenia)

^b Laboratoire Plasma et Conversion d'Energie   (France)

Author keywords

Catalytic probes; Oxygen plasma; Surface recombination

Indexed keywords

CATALYSTS; CHARACTERIZATION; FIBER OPTICS; PLASMA DENSITY; PROBES;

CATALYTIC PROBES; OXYGEN PLASMA; SURFACE RECOMBINATION;

PLASMAS;

EID: 18844460665     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2005.845286     Document Type: Article

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