Plasma parameters of an oxygen microwave discharge obtained by probe diagnostics: II. Radial distributions

Plasma Sources Science and Technology

Volumn 16, Issue 3, 2007, Pages 523-528

  Kiss'ovski, Zh ^a   Brockhaus, A ^b   Korzec, D ^b   Kytzia, S ^b   Engemann, J ^b  

^a UNIVERSITY OF SOFIA   (Bulgaria)

^b UNIVERSITY OF WUPPERTAL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELDS; GAS DYNAMICS; MICROWAVES; PARAMETER ESTIMATION; PLASMA SOURCES; PLASMA WAVES;

NEUTRAL GAS PRESSURE; PASSIVE COMPENSATION; RADIAL DISTRIBUTIONS;

ELECTRIC DISCHARGES;

EID: 34547755696     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/16/3/011     Document Type: Article

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