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Surface and Coatings Technology

Volumn 74-75, Issue PART 1, 1995, Pages 67-74

Remote and direct microwave plasma deposition of HMDSO films: comparative study

(5) Korzec, D a Theirich, D a Werner, F a Traub, K a Engemann, J a

a UNIVERSITY OF WUPPERTAL (Germany)

Author keywords

HMDSO; Microwave discharge; Plasma polymerization; Remote plasma; Scratch resistant films

Indexed keywords

DEPOSITION; MICROWAVE ANTENNAS; MONOMERS; PLASMA SOURCES; POLYCARBONATES; SUBSTRATES; THERMAL LOAD;

HEXAMETHYLDISILOXANE; MICROWAVE DISCHARGE; ORGANIC DEPOSITS; PLASMA CHAMBER; PLASMA POLYMERIZATION; REMOTE PLASMA; SCRATCH-RESISTANT FILMS;

POLYMERIZATION;

EID: 0029378106 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/0257-8972(95)08223-9 Document Type: Article

Times cited : (63)

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