High-aspect ratio permanent photomask for solid-state chemical sensing array

Thin Solid Films

Volumn 444, Issue 1-2, 2003, Pages 241-244

  Chen, Hang ^a   L'Hereec, Frederic ^a   Sasaki, Isao ^a   Janata, Jirí ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

CHEMFET array; Chemical sensors; Thick photomask

Indexed keywords

ORGANIC POLYMERS; ORGANIC SOLVENTS; SILICA; SILICON WAFERS; STRENGTH OF MATERIALS;

CHEMICAL SENSING;

CHEMICAL SENSORS;

EID: 0142011462     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)01128-3     Document Type: Article

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