The development of BCB-sealed galvanic cells. Case study: Aluminum-platinum cells activated with sodium hypochlorite electrolyte solution

Journal of Micromechanics and Microengineering

Volumn 17, Issue 8, 2007, Pages 1737-1745

  Dlutowski, J ^a,b   Biver, C J ^a   Wang, W ^a,c   Knighton, S ^a   Bumgarner, J ^a,c   Langebrake, L ^a,c   Moreno, W ^b   Cardenas Valencia, A M ^a,c  

^a UNIVERSITY OF SOUTH FLORIDA   (United States)

^b UNIVERSITY OF SOUTH FLORIDA   (United States)

^c SRI INTERNATIONAL   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROLYTES; GALVANIZED METAL; REMOTE SENSING; SILICON WAFERS; SODIUM COMPOUNDS;

CELL CATHODES; SODIUM HYPOCHLORITE ELECTROLYTE SOLUTION; THERMODYNAMIC HIGH ENERGY DENSITY;

ELECTROCHEMICAL CELLS;

EID: 34547655754     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/17/8/042     Document Type: Article

References (36)

1. Brown E 2005 The atomic battery technology review. Available at http://www.technologyreview.com/Hardware/wtr_14548,294,p1.html
2. Lee K B and Lin L 2003 Electrolyte-based on-demand and disposable microbattery J. Microelectromech. Syst. 12 840-7
3. Sammoura F, Lee K B and Lin L 2004 Water activated disposable and long shelf life microbatteries Sensors Actuators A 111 79-86
4. Lee K B and Chow P Y 2005 Water-activated film batteries for νTas Proc. νTas Conf. 2005: 9th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (Boston, MA, October 2005) vol 2 pp 1467-9
5. Lee K B 2005 Urine-activated paper batteries for biosystems J. Micromech. Microeng. 15 S210-4
6. Epstein A H et al 1997 Power MEMS and Microengines Transducers 97, The 9th Int. Conf. on Solid-State Sensors and Actuators (IL, USA, June)
7. Wainright J S, Savinell R F, Liu C C and Litt M 2002 Microfabricated fuel cells Electrochim. Acta 48 2869-77
8. Yen T J, Fang N and Zhang X 2003 A micro methanol fuel cell operating near room temperature Appl. Phys. Lett. 83 4056-8
9. Shah K, Shin W C and Besser R S 2004 A PDMS micro proton exchange membrane fuel cell by conventional and non-conventional micro fabrication techniques Sensors Actuators B 97 157-67
10. Chu K-L, Subramanian R, Shannon M A and Masel R I 2005 Proton conducting nano porous silicon membranes for on-chip miniature fuel cell applications Proc. νTas Conf. 2005: 9th Int. Conf. on Miniaturized Systems for Chemistry and Life Sciences (Boston, MA) vol 2 pp 768-9
11. Challa V R, Cardenas-Valencia A M, Fries D, Langebrake L, Benson R F and Bhansali S A 2002 Microfluidic galvanic cell as an on-chip power source Proc. 16th European Conf. on Solid-State Transducers 2002 (Prague, Czech Republic)
12. Cardenas-Valencia A M, Fries D, Broadbent H, Langebrake L and Benson R F 2003 Micro-actuated aluminum galvanic and semi-fuel cells for powering remote lab on a chip applications Proc. 7th Int. Conf. on Miniaturized Chemical and BioChemical Analysis Systems, νTas 2003 pp 311-4
13. Wartena R, Curtright A E, Arnold C B, Pique A and Swider-Lyons K E 2004 Li-ion microbatteries generated by a laser direct write method J. Power Sources 126 193-202
14. Bates J B, Gruzalski G R and Luck C F 1993 Rechargable solid state lithium microbatteries Proc. IEEE Microelectromechanical Systems (MEMS '93) (Fort Lauderdale, FL) pp 82-6
15. Bates J B, Dudney N J, Lubben D C, Gruzalski G R, Kwak B S, Yu X and Zuhr R A 1995 Thin-film rechargeable lithium batteries J. Power Sources 54 58-62
16. Gardner E 2003 When lives are at stake, the batteries better work Small Times 3 29
17. Cardenas-Valencia A M, Challa V R, Fries D, Langebrake L, Benson R F and Bhansali S 2003 A microfluidic galvanic cell as an on-chip power source Sensors Actuators B 95 406-13
18. Cardenas-Valencia A M, Fries D P, Steimle G, Broadbent H, Langebrake L C and Benson R F 2003 Fabrication of micro-actuated galvanic cells as power sources for lab on chip applications by means of novel PCB/MEMS technology Proc. 1st Int. Conf. on Microchannels and Minichannels (NY, USA, 24-25 April) pp 24-5
19. Cardenas-Valencia A M, Dlutowski J, Knighton S, Biver C J, Bumgarner J and Langebrake L 2007 Aluminum-anode micro-cells for powering expendable MEMS & lab-on-a-chip devices Sensors Actuators 122 328-36
20. 2 electrolyte J. Micromech. Microeng. 16 1511-8
21. Chamran F, Min H-S, Dunn B and Kim C-J 2006 Three-dimensional nickel zinc microbatteries The 19th IEEE Ann. Int. Conf. on Micro Electro Mechanical Systems, 2006: MEMS-06 (Istanbul, Turkey, 22-26 January 2006) p 950
22. Hong C-C, Murugesan S, Kim S, Beaucage G, Choi J-W and Ahn C H 2003 A functional on-chip pressure generator using solid chemical propellant for disposable lab-on-a-chip The 16th IEEE Ann. Int. Conf. on Micro Electro Mechanical Systems, 2003: MEMS-03 (Kyoto, 19-23 January 2003) pp 16-9
23. Cardenas-Valencia A M, Dlutowski J, Bumgarner J, Munoz C, Weidong W, Popurri R and Langebrake L 2007 Development of various designs of low power, MEMS valves for fluidic applications Sensors Actuators 136 374-84
24. Cardenas M L, Cardenas-Valencia A M, Bumgarner J, Dlutowski J and Langebrake L 2007 Finite element method modeling approach for the development of metal/silicon nitride MEMS single-use valve arrays J. Micromech. Microeng. accepted for publication
25. Dow 2005 Processing Procedures for CYCLOTENE 4000 Series Photo BCB Resins DS2100 Puddle Develop Process available at http://www.dow.com/cyclotene/prod/ 402646.htm
26. Brenner A 1996 Cells with sodium hypochlorite or chlorite and anodes of magnesium or aluminum J. Electrochem. Soc. 143 3133-8
27. Li Q and Bjerrum N 2002 Aluminum as an anode for energy storage and conversion: a review J. Power Sources 110 1-10
28. Abdien S Z E and Saleh A O 2004 Characterization of aluminum alloys for application as anodes in alkaline batteries J. Appl. Electrochem. 34 331-5
29. Licht S 1995 An overview of aluminum/sulfur battery technology Proc. 10th Ann. Battery Conf. on Applications and Advances (January 1995) pp 95-100
30. Benson R F, Cardenas-Valencia A M and Langebrake L Aluminum galvanic cell, serial no. 10/709,173
31. Niklaus F, Enoksson P, Kulvesten E and Stemme G 2001 Low temperature full wafer adhesive bonding J. Micromech. Microeng. 11 100-7
32. Jourdain A, De Moor P, Baert K, De Wolf I and Tilmans H A C 2005 Mechanical and electrical characterization of BCB as a bond and seal material for cavities housing (RF-)MEMS devices J. Micromech. Microeng. 15 S89-96
33. Linden D and Reddy T B 2002 Handbook of Batteries 3rd edn (New York: McGraw-Hill)
34. Sizeneva I P, Kondrashova N B and Val'tsifer V A 2005 Spontaneous decomposition of industrially manufactures hypochlorite solutions Russ. J. Appl. Chem. 78 541-5
35. Bommaraju T V 1995 Sodium hypochlorite: its application and stability in bleaching Water Quality Res. J. Can. 30 339-61
36. Koeneman P B, Busch-Vishniac L J and Wood K L 1997 Feasibility of micro power supplies for MEMS J. Microelectromech. Syst. 6 355-62