Effect of substrate on hydrogen in and out diffusion from a-Si:H thin films

Journal of Materials Science: Materials in Electronics

Volumn 18, Issue 10, 2007, Pages 1051-1056

  Rao, R ^a,b   Kail, F ^a   Roca i Cabarrocas, P ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGEN EVOLUTION MEASUREMENT; HYDROGEN PLASMA; RADIO FREQUENCY GLOW DISCHARGE REACTOR;

CRYSTAL MICROSTRUCTURE; CRYSTALLINE MATERIALS; DIFFUSION; HYDROGEN; SUBSTRATES; THIN FILMS;

AMORPHOUS SILICON;

EID: 34547608205     PISSN: 09574522     EISSN: 1573482X     Source Type: Journal    
DOI: 10.1007/s10854-007-9123-x     Document Type: Article

References (17)

1. O. Vetterl, A. Lambertz, A. Dasgupta, F. Finger, B. Rech, O. Kluth, H. Wagner, Sol. Energy Mater. Sol. Cells 66, 345 (2001)
2. L. Feitknecht, O. Kluth, Y. Ziegler, X. Niquille, P. Torres, J. Meier, N. Wyrsch, A. Shah, Sol. Energy Mater. Sol. Cells 66, 397 (2001)
3. Y. Chen, K. Pangal, J.C. Sturm, S. Wagner, J. Non-Cryst. Solids 266-269, 1274 (2000)
4. A. Fontcuberta i Morral, P. Roca i Cabarrocas, J. Non-Cryst. Solids 299, Part A, 196 (2002)
5. S. Yamasaki, U.K. Das, T. Yasuda, J. Non-Cryst. Solids 299, Part A, 185 (2002)
6. P.A. Fedders, J. Non-Cryst. Solids 299, Part A, 201 (2002)
7. N.H. Nickel, J. Vac. Sci. & Tech. B 18, 1770 (2000)
8. W. B. Jackson, A.J. Franz, H.C. Jin et al., J. Non-Cryst. Solids 230, Part A, 143 (1998)
9. W. Beyer, Physical B 170, 105 (1991)
10. W. Beyer, J. Non-Cryst. Solids 198-200, 40 (1996)
11. W. Beyer, H. Wagner, J. Non-Cryst. Solids 59-60, Part 1, 161 (1983)
12. W. B. Jackson, J. Non-Cryst. Solids 166, Part 1, 263 (1993)
13. J. Farjas, D. Das, J. Fort, P. Roura, E. Bertran, Phys. Rev. B 65, 115403 (2002)
14. A. Fontcuberta i Morral, P. Roca i Cabarrocas, C. Clerc, Phys. Rev. B 69, 125307 (2004)
15. B. Kalache, A.I. Kosarev, R. Vanderhaghen, P. Roca i Cabarrocas, J. Appl. Phys. 93, 1262 (2003)
16. F. Kail, A. Fontcuberta i Morral, A. Hadjadj, P. Roca i Cabarrocas, A. Beorchia, Philo. Mag. 84, 595 (2004)
17. R. Biswas, Q.M. Li, Phys. Rev. 50, 18090 (1994)