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Volumn 299-302, Issue , 2002, Pages 185-190

Fast hydrogen diffusion in hydrogenated amorphous silicon observed by in situ ESR

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; DIFFUSION; HYDROGEN; HYDROGENATION; PARAMAGNETIC RESONANCE; PLASMA APPLICATIONS;

EID: 0036539811     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-3093(01)01160-7     Document Type: Article
Times cited : (19)

References (17)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.