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Volumn 299-302, Issue , 2002, Pages 185-190
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Fast hydrogen diffusion in hydrogenated amorphous silicon observed by in situ ESR
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Author keywords
[No Author keywords available]
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Indexed keywords
ANNEALING;
DIFFUSION;
HYDROGEN;
HYDROGENATION;
PARAMAGNETIC RESONANCE;
PLASMA APPLICATIONS;
DANGLING BONDS;
AMORPHOUS SILICON;
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EID: 0036539811
PISSN: 00223093
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-3093(01)01160-7 Document Type: Article |
Times cited : (19)
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References (17)
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