Hydrogen diffusion through silicon/silicon dioxide interfaces

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 3, 2000, Pages 1770-1772

  Nickel, N H ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; DEUTERIUM; DIFFUSION; INTERFACES (MATERIALS); SILICA;

POLYCRYSTALLINE SILICON FILMS;

POLYCRYSTALLINE MATERIALS;

EID: 0034187781     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591469     Document Type: Article

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