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Volumn 2002, Issue 6, 2002, Pages 7-11
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Controlled motion, the enabling technology
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
MICROELECTROMECHANICAL DEVICES;
OPTICAL FIBERS;
REFRACTIVE INDEX;
RELIABILITY;
SILICA;
PLANAR LIGHTGUIDE CIRCUITS (PLC);
INTELLIGENT MATERIALS;
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EID: 0041993878
PISSN: 14713918
EISSN: None
Source Type: Journal
DOI: 10.1016/S1471-3918(02)80071-5 Document Type: Article |
Times cited : (1)
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References (0)
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