Alignment of laboratory-scale soft X-ray microscope using laser plasma

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 1, 2007, Pages 394-399

  Kang, Dongwoo ^a   Kang, Sunghoon ^a   Kwon, Youngman ^b   Kim, Kyongwoo ^b   Yu, Hongki ^a   Kim, Taehun ^a   Gweon, Daegab ^a   Rah, Seungyu ^c   Min, Jinyoung ^c   Yoon, Kwonha ^b  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Wonkwang University   (South Korea)

^c POSTECH   (South Korea)

Author keywords

Alignment algorithm; Grazing incidence reflective mirror; Laser produced plasma source; Nanotechnology; Precision stage; Sott X ray microscope; Tandem ellipsoidal condenser mirror; X ray optics

Indexed keywords

COMPUTER CONTROL; LASER PRODUCED PLASMAS; PLASMA DENSITY; PLASMA JETS; PLASMA SOURCES;

ALIGNMENT ALGORITHM; GRAZING INCIDENCE REFLECTIVE MIRROR; LASER-PRODUCED PLASMA SOURCE; PRECISION STAGE; SOTT X-RAY MICROSCOPE; TANDEM ELLIPSOIDAL CONDENSER MIRROR;

X RAY MICROSCOPES;

EID: 34547565488     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.394     Document Type: Article

References (16)

1. J. Kirz, C Jacobson, and M. Howells: Q. Rev. Biophys. 28 (1995) 33.
2. G. Schmahl and D. Rudolph: Optik 29 (1969) 577.
3. C. Jacobsen: Trends Cell Biol. 9 (1999) 44.
4. B. Niemann, D. Rudolph, G. Schmahl, M. Diehl, J. Thieme, W. Meyerilse, W. Neff, R. Holz, R. Lebert, F. Richter, and G. Herziger: Optik 84 (1990) 35.
5. D. Attwood: Soft X-rays and Extreme Ultraviolet Radiation (Cambridge University Press, Cambridge, U.K., 1999).
6. W. Chao, B. D. Harteneck, A. Liddle, E. H. Anderson, and D. T. Attwood: Nature 435 (2005) 1210.
7. S. Nakayama, K. Haramura, G. M. Zeng, H. Daido, M. Nakatsuka, S. Nakai, N. Katakura, H. Nagata, and H. Aritome: Jpn. J. Appl. Phys. 33 (1994) L1280.
8. D. Rudolph, G. Schmahl, B. Niemann, M. Diehl, J. Thieme, R. Wilhein, C David, and K. Michelmann: in X-ray Microscopy IV, ed. V. V. Aristov and A. I. Erko (Bogorodskii Pechatnik, Chernogolovka, Moscow, 1994) p. 381.
9. G. A. Johansson, A. Holmberg, H. M. Hertz, and M. Berglund: Rev. Sci. Instrum. 73 (2002) 1193.
10. L. Malmqvist, L. Rymell, M. Berglund, and H. M. Hertz: Rev. Sci. Instrum. 67 (1996) 4150.
11. G. Zeng, H. Daido, T. Togawa, M. Nakatsuka, and S. Nakai: J. Appl. Phys. 69 (1991.) 7460.
12. R. Medenwaldt and E. Uggerhøj: Rev. Sci. Instrum. 69 (1998) 2974.
13. K. W. Kim, Y. M. Kwon, K. G. Kim, K. Y. Nam, D. W. Kang, S. H. Rang, D. G. Gweon, S. R. J. Y. Min, and K. H. Yoon: Proc. 8th Int. Conf. X-ray Microscopy, 2005, p. 79.
14. K. W. Kim, Y. M. Kwon, K. Y. Nam, J. H. Lim, K. G. Kim, K. S. Chon, H. H. Kim, D. E. Kim, J. G. Kim, B. N. Ahn, H. J. Shin, S. Y. Rah, K. H. Kim, J. S. Chae, D. G. Gweon, D. W. Kang, S. H. Kang, J. Y. Min, K. S. Choi, S. E. Yoon, E. A. Kim, Y. Namba, and K. H. Yoon: Phys. Med. Biol. 51 (2006) N99.
15. B. Kim, J. Kim, B. Ahn, D. Lee, and D. E. Kim: Proc. 8th Int. Conf. X-ray Microscopy, 2005, p. 145.
16. T. Kim, D. Kang, H. You, S. Kang, D. G. Gweon, and K. H. Yoon: Proc. 8th Int. Conf. X-ray Microscopy, 2005, p. 38.