High-Power Inchworm® actuators for extended-range precision positioning

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5762, Issue , 2005, Pages 287-298

  Powers, Galen ^a,b   Xu, Qin ^a,c   Guidarelli, Thomas ^a,c   Smith, James ^a,d  

^a EXPO Burleigh Products Group Inc   (Canada)

^b BHC Technologies   (United States)

^c New Scale Technologies   (United States)

^d JA Smith and Co   (United States)

Author keywords

Actuator; Adaptive optics; Alignment; Nanometer; Photonics; Power density; Resolution; Voltage amplifier

Indexed keywords

ELECTRONIC EFFICIENCY; NANOMETERS; PHOTONICS; POWER DENSITY; RESOLUTION; VOLTAGE AMPLIFIERS;

ADAPTIVE OPTICS; ALIGNMENT; CAPACITANCE; MICROMETERS; PRECISION ENGINEERING; SEMICONDUCTOR DEVICES;

ACTUATORS;

EID: 25144521866     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.600584     Document Type: Conference Paper

References (4)

1. Powers, G., Xu, Q., and Smith, J., "The next generation of Inchworm actuators evolves with nanometer resolution, multi-millimeter range and power-off hold", Proc. SPIE 5388, 155 (2004).
2. Powers, G., Xu, Q., Fasick, J., and Smith, J., "Nanometer Resolution Actuator with Multi-Millimeter Range and Power-Off Hold", Proc. SPIE 5054, 108 (2003).
3. Private communication, request for quotation, Galen Powers, EXFO Burleigh Products Group
4. Xu, Q., Powers, G., and Fisher, Y., "Stability effects on optical component assembly and measurement using an automation system", Proc. SPIE 4833, 284 (2002).