Crystallization of thin-film Si monitored in real time by in-situ spectroscopic techniques

Journal of Materials Science: Materials in Electronics

Volumn 18, Issue SUPPL. 1, 2007, Pages 309-313

  Stradins, Pauls ^a   Teplin, C W ^a   Young, D L ^a   Yan, Y ^a   Branz, H M ^a   Wang, Q ^a  

^a NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGEN EFFUSION; SOLID PHASE CRYSTALLIZATION;

CRYSTALLIZATION; EPITAXIAL GROWTH; NUCLEATION; REFLECTION; SPECTROSCOPIC ELLIPSOMETRY; THIN FILMS;

AMORPHOUS SILICON;

EID: 34547587680     PISSN: 09574522     EISSN: 1573482X     Source Type: Journal    
DOI: 10.1007/s10854-007-9222-8     Document Type: Conference Paper

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