Real time spectroscopic ellipsometry studies of the solid phase crystallization of amorphous silicon

Materials Research Society Symposium - Proceedings

Volumn 507, Issue , 1999, Pages 939-944

  Fujiwara, H ^a   Koh, Joohyun ^a   Lee, Yeeheng ^a   Wronski, C R ^a   Collins, R W ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; AMORPHOUS SILICON; CRYSTAL GROWTH; CRYSTALLIZATION; ELLIPSOMETRY; GRAIN SIZE AND SHAPE; NUCLEATION; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING FILMS; VOLUME FRACTION;

REAL TIME SPECTROSCOPIC ELLIPSOMETRY (RTSE); SOLID PHASE CRYSTALLIZATION;

SEMICONDUCTING SILICON;

EID: 0032675052     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (25)