Quality measurement of niobium thin films for Nb/Cu superconducting RF cavities

Measurement Science and Technology

Volumn 18, Issue 8, 2007, Pages 2299-2313

  Russo, Roberto ^a  

^a CNR   (Italy)

Author keywords

Electrical properties; Magnetron sputtering; Structural properties; Superconducting cavities; Thin film; Vacuum arc

Indexed keywords

DEGRADATION; DEPOSITION RATES; MAGNETRON SPUTTERING; NIOBIUM; PARTICLE ACCELERATORS; RESONATORS; STRUCTURAL PROPERTIES; TRANSPORT PROPERTIES;

ARC DEPOSITION; ELECTRICAL PROPERTIES; QUALITY MEASUREMENT;

THIN FILMS;

DEGRADATION; DEPOSITION RATES; MAGNETRON SPUTTERING; NIOBIUM; PARTICLE ACCELERATORS; RESONATORS; STRUCTURAL PROPERTIES; THIN FILMS; TRANSPORT PROPERTIES;

EID: 34547490189     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/8/003     Document Type: Article

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